Martin L. Green

Martin L. Green publication distribution in Materials Science in 2026

The chart shows the distribution of publications by all Research.com ranked scientists in the field of Materials Science in 2026. The highlighted bar marks where Martin L. Green sits on this spectrum.

Martin L. Green D-index placement in Materials Science in 2026

The chart shows the D-index (discipline H-index) distribution of Materials Science scientists ranked by Research.com in 2026. The highlighted bar marks where Martin L. Green sits on this spectrum.

Research.com Recognitions

• 2011 - Fellow of the Materials Research Society

Overview

Best Publications

• Ultrathin (<4 nm) SiO2 and Si-O-N gate dielectric layers for silicon microelectronics: Understanding the processing, structure, and physical and electrical limits

  M. L. Green;E. P. Gusev;R. Degraeve;Eric Garfunkel

  1142
  Citations

• Totally relaxed GexSi1−x layers with low threading dislocation densities grown on Si substrates

  E. A. Fitzgerald;Y.‐H. Xie;M. L. Green;D. Brasen

  951
  Citations

• The 2019 materials by design roadmap

  Kirstin Alberi;Marco Buongiorno Nardelli;Andriy Zakutayev;Lubos Mitas

  344
  Citations

• Chemical Vapor Deposition of Ruthenium and Ruthenium Dioxide Films.

  M. L. Green;M. E. Gross;L. E. Papa;K. J. Schnoes

  321
  Citations

• Fulfilling the promise of the materials genome initiative with high-throughput experimental methodologies

  M. L. Green;C. L. Choi;J. R. Hattrick-Simpers;A. M. Joshi

  309
  Citations

• Applications of high throughput (combinatorial) methodologies to electronic, magnetic, optical, and energy-related materials

  Martin L. Green;Ichiro Takeuchi;Jason R. Hattrick-Simpers

  290
  Citations

• Growth and characterization of ultrathin nitrided silicon oxide films

  E. P. Gusev;H.-C. Lu;E. L. Garfunkel;T. Gustafsson

  279
  Citations

• Synthesis and characterization of aerosol silicon nanocrystal nonvolatile floating-gate memory devices

  M. L. Ostraat;J. W. De Blauwe;M. L. Green;L. D. Bell

  259
  Citations

• Semiconductor heterostructure devices with strained semiconductor layers

  Daniel Brasen;Eugene A. Fitzgerald;Martin L. Green;Donald P. Monroe

  234
  Citations

• The Vertical Replacement-Gate (VRG) MOSFET: a 50-nm vertical MOSFET with lithography-independent gate length

  J.M. Hergenrother;D. Monroe;F.P. Klemens;G.R. Weber

  204
  Citations

• Rapid thermal oxidation of silicon in N2O between 800 and 1200°C: Incorporated nitrogen and interfacial roughness

  M. L. Green;D. Brasen;K. W. Evans‐Lutterodt;L. C. Feldman

  199
  Citations

• A model for the FCC→HCP transformation, its applications, and experimental evidence

  S. Mahajan;M. L. Green;D. Brasen

  196
  Citations

• Morphology and crystallization kinetics in HfO2 thin films grown by atomic layer deposition

  M.-Y. Ho;H. Gong;G. D. Wilk;B. W. Busch

  193
  Citations

• Field effect devices and capacitors with improved thin film dielectrics and method for making same

  Daniel Brasen;Eric L. Garfunkel;Martin L. Green;Evgeni Petrovich Gusev

  191
  Citations

• Fabrication process for a semiconductor device having a metal oxide dielectric material with a high dielectric constant, annealed with a buffered anneal process

  Martin L. Green;Glen D. Wilk

  181
  Citations

• Measurement, Standards, and Data Needs for CO2 Capture Materials: A Critical Review

  Laura Espinal;Dianne L. Poster;Winnie K. Wong-Ng;Andrew J. Allen

  179
  Citations

• Multi-component high-K gate dielectrics for the silicon industry

  L Manchanda;M.D Morris;M.L Green;R.B van Dover

  174
  Citations

• Profiling nitrogen in ultrathin silicon oxynitrides with angle-resolved x-ray photoelectron spectroscopy

  J. P. Chang;J. P. Chang;M. L. Green;V. M. Donnelly;R. L. Opila

  162
  Citations

• Enhanced initial growth of atomic-layer-deposited metal oxides on hydrogen-terminated silicon

  Martin M. Frank;Yves Jean Chabal;Martin L. Green;Annelies Delabie

  158
  Citations

• Ultraclean two-stage aerosol reactor for production of oxide-passivated silicon nanoparticles for novel memory devices

  Michele L. Ostraat;Jan W. De Blauwe;Martin L. Green;L. Douglas Bell

  154
  Citations