Timo Sajavaara

Overview

Best Publications

• Atomic Layer Deposition of Oxide Thin Films with Metal Alkoxides as Oxygen Sources

  Mikko Ritala;Kaupo Kukli;Antti Rahtu;Petri I. Räisänen

  666
  Citations

• Atomic Layer Deposition of Platinum Thin Films

  Titta Aaltonen;Mikko Ritala;Timo Sajavaara;Juhani Keinonen

  520
  Citations

• Effect of water dose on the atomic layer deposition rate of oxide thin films

  Raija Matero;Antti Rahtu;Mikko Ritala;Markku Leskelä

  353
  Citations

• Atomic Layer Deposition of Photocatalytic TiO2 Thin Films from Titanium Tetramethoxide and Water

  Viljami Pore;Antti Rahtu;Markku Leskelä;Mikko Ritala

  291
  Citations

• Atomic Layer Deposition of Hafnium Dioxide Films from Hafnium Tetrakis(ethylmethylamide) and Water

  Kaupo Kukli;Mikko Ritala;Timo Sajavaara;Juhani Keinonen

  272
  Citations

• Potku - New analysis software for heavy ion elastic recoil detection analysis

  Kai Arstila;Jaakko Julin;Mikko Laitinen;Jarkko Aalto

  248
  Citations

• Comparison of hafnium oxide films grown by atomic layer deposition from iodide and chloride precursors

  Kaupo Kukli;Mikko Ritala;Timo Sajavaara;Juhani Keinonen

  242
  Citations

• Properties of hafnium oxide films grown by atomic layer deposition from hafnium tetraiodide and oxygen

  Kaupo Kukli;Mikko Ritala;Jonas Sundqvist;Jaan Aarik

  229
  Citations

• Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion

  Oili M.E. Ylivaara;Xuwen Liu;Lauri Kilpi;Jussi Lyytinen

  208
  Citations

• Atomic Layer Deposition of Titanium Oxide from TiI4 and H2O2

  Kaupo Kukli;Kaupo Kukli;Mikko Ritala;Mikael Schuisky;Markku Leskelä

  201
  Citations

• Detection efficiency of time-of-flight energy elastic recoil detection analysis systems

  Yanwen Zhang;Harry J. Whitlow;Thomas Winzell;Ian F. Bubb

  199
  Citations

• Atomic Layer Deposition of SrTiO3 Thin Films from a Novel Strontium Precursor–Strontium‐bis(tri‐isopropyl cyclopentadienyl)

  Marko Vehkamäki;Timo Hänninen;Mikko Ritala;Markku Leskelä

  169
  Citations

• Low-temperature ALE deposition of Y2O3 thin films from β-diketonate precursors

  Matti Putkonen;Timo Sajavaara;Leena-Sisko Johansson;Lauri Niinistö

  167
  Citations

• Atomic layer deposition of polyimide thin films

  Matti Putkonen;Jenni Harjuoja;Timo Sajavaara;Lauri Niinistö

  163
  Citations

• Properties of AlN grown by plasma enhanced atomic layer deposition

  Markus Bosund;Timo Sajavaara;Mikko Laitinen;Teppo Huhtio

  159
  Citations

• Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films

  Maarit Kariniemi;Jaakko Niinistö;Timo Hatanpää;Marianna Kemell

  157
  Citations

• Short-ranged structural rearrangement and enhancement of mechanical properties of organosilicate glasses induced by ultraviolet radiation

  F Iacopi;Y Travaly;B Eyckens;C Waldfried

  156
  Citations

• Atomic Layer Deposition of Ta(Al)N(C) Thin Films Using Trimethylaluminum as a Reducing Agent

  Petra Alén;Marika Juppo;Mikko Ritala;Timo Sajavaara

  152
  Citations

• Low-temperature atomic layer deposition of ZnO thin films: Control of crystallinity and orientation

  Jari Malm;Elina Sahramo;Juho Perälä;Timo Sajavaara

  141
  Citations

• Analysis of ALD-processed thin films by ion-beam techniques

  Matti Putkonen;Timo Sajavaara;Lauri Niinistö;Juhani Keinonen

  137
  Citations

• Surface-controlled growth of LaAlO3 thin films by atomic layer epitaxy

  Minna Nieminen;Timo Sajavaara;Eero Rauhala;Matti Putkonen

  135
  Citations