2026 Steven M. George: Materials Science Researcher – H-Index, Publications & Awards

Discipline name	D-Index	World Ranking	Current World Ranking	National Ranking	Current National Ranking	Publications	Citations
Materials Science	125	409	391	150	137	579	59682
Chemistry	124	415	371	179	145	528	58105

Research.com Recognitions

1997 - Fellow of American Physical Society (APS) Citation For advancements in our understanding of gassurface energy transfer dynamics, surface kinetics and diffusion processes, environmental chemistry at gassurface interfaces, heterogeneous catalysis, and chemically controlled eptiaxy of novel thin film materials

Overview

Steven M. George is affiliated with the University of Colorado Boulder in the United States. Their research primarily focuses on the fields of Engineering and Materials Science, with a particular emphasis on subfields such as Electrical and Electronic Engineering, Materials Chemistry, Biomedical Engineering, Electronic, Optical and Magnetic Materials, and Computational Mechanics.

George's work extensively covers topics related to Semiconductor materials and devices, Electronic and Structural Properties of Oxides, ZnO doping and properties, Plasma Diagnostics and Applications, Catalytic Processes in Materials Science, Advanced Memory and Neural Computing, and Ferroelectric and Negative Capacitance Devices.

Among recent publications, several notable papers authored or co-authored by George include:

"Mechanisms of Thermal Atomic Layer Etching" (2020), published in Accounts of Chemical Research
"Thermal atomic layer etching: A review" (2021), Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
"Smoothing surface roughness using Al2O3 atomic layer deposition" (2021), Applied Surface Science
"Thermal atomic layer etching of silicon nitride using an oxidation and 'conversion etch' mechanism" (2020), Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
"Effect of crystallinity on thermal atomic layer etching of hafnium oxide, zirconium oxide, and hafnium zirconium oxide" (2020), Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Steven M. George frequently publishes in the following venues:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
Chemistry of Materials
The Journal of Physical Chemistry C
ECS Meeting Abstracts
Applied Surface Science

Collaboration is a significant aspect of George's research, with frequent co-authors including Andrew S. Cavanagh, Jonathan L. Partridge, Jessica A. Murdzek, Thorsten Lill, and Ann Lii-Rosales.

In recognition of their contributions, Steven M. George received the Fellowship of the American Physical Society in 1997. The citation highlighted advancements in understanding gas-surface energy transfer dynamics, surface kinetics and diffusion processes, environmental chemistry at gas-surface interfaces, heterogeneous catalysis, and chemically controlled epitaxy of novel thin film materials.

Best Publications

Atomic layer deposition: an overview.

Steven M. George

9653
Citations
Low-Temperature Al2O3 Atomic Layer Deposition

M. D. Groner;F. H. Fabreguette;J. W. Elam;S. M. George

1788
Citations
Surface Chemistry for Atomic Layer Growth

S. M. George;and A. W. Ott;J. W. Klaus

1247
Citations
Electrical characterization of thin Al2O3 films grown by atomic layer deposition on silicon and various metal substrates

M.D. Groner;J.W. Elam;F.H. Fabreguette;S.M. George

956
Citations
Enhanced Stability of LiCoO2 Cathodes in Lithium-ion Batteries Using Surface Modification by Atomic Layer Deposition

Yoon S. Jung;Andrew S. Cavanagh;Anne C. Dillon;Markus D. Groner

918
Citations
Hydrogen desorption kinetics from monohydride and dihydride species on silicon surfaces.

P. Gupta;V. L. Colvin;S. M. George

771
Citations
Conformal Coating on Ultrahigh-Aspect-Ratio Nanopores of Anodic Alumina by Atomic Layer Deposition

J. W. Elam;D. Routkevitch;P. P. Mardilovich;S. M. George

760
Citations
Viscous flow reactor with quartz crystal microbalance for thin film growth by atomic layer deposition

J. W. Elam;M. D. Groner;S. M. George

729
Citations
Al3O3 thin film growth on Si(100) using binary reaction sequence chemistry

A.W. Ott;J.W. Klaus;J.M. Johnson;S.M. George

708
Citations
Ultrathin Direct Atomic Layer Deposition on Composite Electrodes for Highly Durable and Safe Li‐Ion Batteries

Yoon Seok Jung;Yoon Seok Jung;Andrew S. Cavanagh;Leah A. Riley;Sun Ho Kang

658
Citations
Surface chemistry of Al2O3 deposition using Al(CH3)3 and H2O in a binary reaction sequence

A.C. Dillon;A.W. Ott;J.D. Way;S.M. George

615
Citations
Nucleation and Growth during Al2O3 Atomic Layer Deposition on Polymers

C. A. Wilson;R. K. Grubbs;S. M. George

573
Citations
Ca test of Al2O3 gas diffusion barriers grown by atomic layer deposition on polymers

P. F. Carcia;R. S. McLean;M. H. Reilly;M. D. Groner

542
Citations
Gas Diffusion Barriers on Polymers Using Multilayers Fabricated by Al2O3 and Rapid SiO2 Atomic Layer Deposition

Arrelaine A. Dameron;Stephen D. Davidson;Beau B. Burton;Peter F. Carcia

535
Citations
Gas diffusion barriers on polymers using Al2O3 atomic layer deposition

M. D. Groner;S. M. George;R. S. McLean;P. F. Carcia

515
Citations
Surface chemistry for molecular layer deposition of organic and hybrid organic-inorganic polymers.

Steven M. George;Byunghoon Yoon;Arrelaine A. Dameron

499
Citations
Growth of ZnO/Al2O3 Alloy Films Using Atomic Layer Deposition Techniques

J. W. Elam;S. M. George

482
Citations
Ultra-low thermal conductivity in W/Al2O3 nanolaminates.

R. M. Costescu;David G Cahill;F. H. Fabreguette;Z. A. Sechrist

477
Citations
Fe3O4 Nanoparticles Confined in Mesocellular Carbon Foam for High Performance Anode Materials for Lithium‐Ion Batteries

Eunae Kang;Yoon Seok Jung;Andrew S. Cavanagh;Gi Heon Kim

466
Citations
Ultrathin coatings on nano-LiCoO2 for Li-ion vehicular applications

Isaac D. Scott;Yoon Seok Jung;Andrew S. Cavanagh;Yanfa Yan

462
Citations