Ellie Yieh

Ellie Yieh publication distribution in Materials Science in 2026

The chart shows the distribution of publications by all Research.com ranked scientists in the field of Materials Science in 2026. The highlighted bar marks where Ellie Yieh sits on this spectrum.

Ellie Yieh D-index placement in Materials Science in 2026

The chart shows the D-index (discipline H-index) distribution of Materials Science scientists ranked by Research.com in 2026. The highlighted bar marks where Ellie Yieh sits on this spectrum.

Best Publications

• Method and apparatus for gettering fluorine from chamber material surfaces

  Li-Qun Xia;Visweswaren Sivaramakrishnan;Srinivas Nemani;Ellie Yieh

  448
  Citations

• Post-deposition treatment to enhance properties of Si-O-C low k films

  Li-Qun Xia;Frederic Gaillard;Ellie Yieh;Tian H. Lim

  430
  Citations

• Formation of fluid silicon layer by reaction of organic silicon compound with hydroxyl forming compound

  David W Cheung;Frederick Gaillard;Shin-Puu Jeng;Chi-I Lang

  421
  Citations

• Method and system for improving dielectric film quality for void free gap fill

  Abhijit Basu Mallick;Jeffrey C. Munro;Linlin Wang;Srinivas D. Nemani

  418
  Citations

• Method of forming high quality silicon oxide film by remote plasma cvd from disilane precursor

  Abhijit Basu Mallick;Srinivas D Nemani;Ellie Yieh;バス マリック アビジット

  416
  Citations

• Process for forming a low dielectric constant carbon-containing film

  Frederic Gaillard;Li-Qun Xia;Jen Shu;Ellie Yieh

  403
  Citations

• Process chamber for dielectric gapfill

  Dmitry Lubomirsky;Qiwei Liang;Soonam Park;Kien N Chuc

  373
  Citations

• Method of depositing dielectric materials including oxygen-doped silicon carbide in damascene applications

  Ju-hyung Lee;Ping Xu;Shankar Venkataraman;Li-Qun Xia

  329
  Citations

• Multi-step dep-etch-dep high density plasma chemical vapor deposition processes for dielectric gapfills

  Zhong Qiang Hua;Rionard Purnawan;Jason Thomas Bloking;Anchuan Wang

  325
  Citations

• Method of decreasing the K value in SIOC layer deposited by chemical vapor deposition

  Frederic Gaillard;Li-Qun Xia;Tian-Hoe Lim;Ellie Yieh

  315
  Citations

• Dual frequency plasma enhanced chemical vapor deposition of silicon carbide layers

  Srinivas D. Nemani;Li-Qun Xia;Ellie Yieh

  291
  Citations

• Method of depositing dielectric films

  Srinivas D Nemani;Li-Qun Xia;Dian Sugiarto;Ellie Yieh

  284
  Citations

• Methods and apparatus for shallow trench isolation

  Ellie Yieh;Li-Qun Xia;Srinivas Nemani

  278
  Citations

• MULTISTAGE CHAMBER CLEANING PROCESS FOR IMPROVING FILM GAP FILLING USING REMOTE PLASMA

  Xia Li-Qun;Yieh Ellie

  273
  Citations

• Thermal CVD process for depositing a low dielectric constant carbon-doped silicon oxide film

  Li-Qun Xia;Fabrice Geiger;Frederic Gaillard;Ellie Yieh

  251
  Citations

• Dual Top Gas Feed Through Distributor for High Density Plasma Chamber

  Won B. Bang;Srivivas D. Nemani;Phong Pham;Ellie Y. Yieh

  222
  Citations

• Methods and apparatus for depositing premetal dielectric layer at sub-atmospheric and high temperature conditions

  Li-Qun Xia;Ellie Yieh;Srinivas Nemani

  214
  Citations

• Method and apparatus for deposition of low dielectric constant materials

  Kang Sub Yim;Soovo Sen;Dian Sugiarto;Peter Lee

  181
  Citations

• Method of depositing low k films

  Tzu-Fang Huang;Yung-Cheng Lu;Li-Qun Xia;Ellie Yieh

  177
  Citations

• Lid assembly for a process chamber employing asymmetric flow geometries

  Won Bang;Ellie Yieh;Thanh Pham

  160
  Citations