D-Index & Metrics Best Publications

Srinivas D. Nemani

Applied Materials (United States)
United States

D-Index & Metrics D-index (Discipline H-index) only includes papers and citation values for an examined discipline in contrast to General H-index which accounts for publications across all disciplines.

Discipline name Citations Publications World Ranking National Ranking

Engineering and Technology D-index 35 Citations 6,306 131 World Ranking 5177 National Ranking 1653

Best Publications

A method for depositing and curing low-k films for gapfill and conformal film applications

Munro Jeffery C;Nemani Srinivas D.
(2007)

509 Citations

Method and apparatus for gettering fluorine from chamber material surfaces

Li-Qun Xia;Visweswaren Sivaramakrishnan;Srinivas Nemani;Ellie Yieh.
(1996)

448 Citations

Method and system for improving dielectric film quality for void free gap fill

Abhijit Basu Mallick;Jeffrey C. Munro;Linlin Wang;Srinivas D. Nemani.
(2007)

418 Citations

High quality silicon oxide films by remote plasma cvd from disilane precursors

Abhijit Basu Mallick;Srinivas D. Nemani;Ellie Yieh.
(2010)

407 Citations

Formation of a liquid-like silica layer by reaction of an organosilicon compound and a hydroxyl forming compound

David W Cheung;Frederick Gaillard;Shin-Puu Jeng;Chi-I Lang.
(1999)

347 Citations

Method of depositing dielectric materials in damascene applications

Ju-hyung Lee;Ping Xu;Shankar Venkataraman;Li-Qun Xia.
(2002)

322 Citations

Methods for forming silicon nitride based film or silicon carbon based film

Abhijit Basu Mallick;Srinivas D. Nemani.
(2009)

310 Citations

Dual frequency plasma enhanced chemical vapor deposition of silicon carbide layers

Srinivas D. Nemani;Li-Qun Xia;Ellie Yieh.
(2001)

291 Citations

Method of depositing low dielectric constant silicon carbide layers

Francimar Campana;Srinivas Nemani;Michael Chapin;Shankar Venkataraman.
(2003)

283 Citations

Method of depositing dielectric films

Srinivas D Nemani;Li-Qun Xia;Dian Sugiarto;Ellie Yieh.
(2004)

266 Citations

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Personal Website for Srinivas D. Nemani

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Srinivas D. Nemani

D-Index & Metrics D-index (Discipline H-index) only includes papers and citation values for an examined discipline in contrast to General H-index which accounts for publications across all disciplines.

Best Publications

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Best Scientists Citing Srinivas D. Nemani

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