Alfred Grill

Research.com Recognitions

• 2014 - Fellow of the Materials Research Society
• 2012 - Member of the National Academy of Engineering For contributions to low dielectric constant insulators for the interconnects of very large scale integrated electronic devices.

Overview

Best Publications

• 100-GHz Transistors from Wafer-Scale Epitaxial Graphene

  Y.-M. Lin;C. Dimitrakopoulos;K. A. Jenkins;D. B. Farmer

  3281
  Citations

• Diamond-like carbon: state of the art

  Alfred Grill

  1395
  Citations

• Wafer-Scale Graphene Integrated Circuit

  Yu-Ming Lin;Alberto Valdes-Garcia;Shu-Jen Han;Damon B. Farmer

  1147
  Citations

• Structure of low dielectric constant to extreme low dielectric constant SiCOH films: Fourier transform infrared spectroscopy characterization

  Alfred Grill;Deborah A. Neumayer

  893
  Citations

• Tribology of diamondlike carbon and related materials: an updated review

  A. Grill

  632
  Citations

• Diamond-like carbon coatings as biocompatible materials—an overview

  A. Grill

  586
  Citations

• Hydrogenated oxidized silicon carbon material

  Alfred Grill;Christopher Vincent Jahnes;Vishnubhai Vitthalbhai Patel;Laurent Claude Perraud

  509
  Citations

• Review of the tribology of diamond-like carbon

  A. Grill

  464
  Citations

• Strained Si NMOSFETs for high performance CMOS technology

  K. Rim;S. Koester;M. Hargrove;J. Chu

  335
  Citations

• Friction control of diamond-like carbon coatings

  C. Donnet;A. Grill

  331
  Citations

• Progress in the development and understanding of advanced low k and ultralow k dielectrics for very large-scale integrated interconnects—State of the art

  Alfred Grill;Stephen M. Gates;Todd E. Ryan;Son V. Nguyen

  327
  Citations

• Electrical and optical properties of diamond-like carbon

  A Grill

  321
  Citations

• Transferable device-containing layer for silicon-on-insulator applications

  Jack Oon Chu;Alfred Grill;Dean A. Herman;Katherine L. Saenger

  314
  Citations

• Cold Plasma Materials Fabrication

  Unknown

  313
  Citations

• Plasma enhanced chemical vapor deposited SiCOH dielectrics: from low-k to extreme low-k interconnect materials

  Alfred Grill

  312
  Citations

• Picosecond optical studies of amorphous diamond and diamondlike carbon: Thermal conductivity and longitudinal sound velocity

  Christopher J. Morath;Humphrey J. Maris;Jerome J. Cuomo;David L. Pappas

  295
  Citations

• The role of hydrogen on the friction mechanism of diamond-like carbon films

  C. Donnet;J. Fontaine;A. Grill;T. Le Mogne

  276
  Citations

• LOW DIELECTRIC CONSTANT FILMS PREPARED BY PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION FROM TETRAMETHYLSILANE

  A. Grill;V. Patel

  275
  Citations

• Plating of noble metal electrodes for DRAM and FRAM

  Panayotis Constantinou Andricacos;James Hartfiel Comfort;Alfred Grill;David Edward Kotecki

  264
  Citations

• Dual damascene processing for semiconductor chip interconnects

  Alfred Grill;John Patrick Hummel;Christopher Vincent Jahnes;Vishnubhai Vitthalbhai Patel

  261
  Citations

• Multi component dielectric layer

  Stephen M Gates;Alfred Grill;Son Van Nguyen;Satyanarayana Venkata Nitta

  253
  Citations