Vishnubhai Vitthalbhai Patel

Vishnubhai Vitthalbhai Patel publication distribution in Materials Science in 2026

The chart shows the distribution of publications by all Research.com ranked scientists in the field of Materials Science in 2026. The highlighted bar marks where Vishnubhai Vitthalbhai Patel sits on this spectrum.

Vishnubhai Vitthalbhai Patel D-index placement in Materials Science in 2026

The chart shows the D-index (discipline H-index) distribution of Materials Science scientists ranked by Research.com in 2026. The highlighted bar marks where Vishnubhai Vitthalbhai Patel sits on this spectrum.

Best Publications

• Hydrogenated oxidized silicon carbon material

  Alfred Grill;Christopher Vincent Jahnes;Vishnubhai Vitthalbhai Patel;Laurent Claude Perraud

  509
  Citations

• Picosecond optical studies of amorphous diamond and diamondlike carbon: Thermal conductivity and longitudinal sound velocity

  Christopher J. Morath;Humphrey J. Maris;Jerome J. Cuomo;David L. Pappas

  295
  Citations

• LOW DIELECTRIC CONSTANT FILMS PREPARED BY PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION FROM TETRAMETHYLSILANE

  A. Grill;V. Patel

  275
  Citations

• Plating of noble metal electrodes for DRAM and FRAM

  Panayotis Constantinou Andricacos;James Hartfiel Comfort;Alfred Grill;David Edward Kotecki

  264
  Citations

• Dual damascene processing for semiconductor chip interconnects

  Alfred Grill;John Patrick Hummel;Christopher Vincent Jahnes;Vishnubhai Vitthalbhai Patel

  261
  Citations

• An ultralow dielectric constant material as an int

  Gates Stephen M;Grill Alfred;Medeiros David;Neumayer Deborah A

  243
  Citations

• Multiphase low dielectric constant material

  Alfred Grill;Vishnubhai Vitthalbhai Patel;Stephen McConnell Gates

  223
  Citations

• Optical and tribological properties of heat-treated diamond-like carbon

  A. Grill;V. Patel;B. S. Meyerson

  173
  Citations

• The respective role of oxygen and water vapor on the tribology of hydrogenated diamond-like carbon coatings

  C. Donnet;T. Le Mogne;L. Ponsonnet;M. Belin

  167
  Citations

• Inhomogeneous carbon bonding in hydrogenated amorphous carbon films

  A. Grill;B. S. Meyerson;V. V. Patel;J. A. Reimer

  165
  Citations

• Diamondlike carbon films by rf plasma-assisted chemical vapor deposition from acetylene

  A. Grill;B. S. Meyerson;V. V. Patel

  160
  Citations

• Multiphase low dielectric constant material and method of deposition

  Alfred Grill;Vishnubhai Vitthalbhai Patel;Stephen McConnell Gates

  160
  Citations

• Ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device containing the same

  Alfred Grill;David R. Medeiros;Vishnubhai V. Patel

  138
  Citations

• Porosity in plasma enhanced chemical vapor deposited SiCOH dielectrics: A comparative study

  A. Grill;V. Patel;K. P. Rodbell;E. Huang

  135
  Citations

• Tunable vapor deposited materials as antireflective coatings, hardmasks and as combined antireflective coating/hardmasks and methods of fabrication thereof and applications thereof

  Marie Angelopoulos;Katherina Babich;Alfred Grill;Scott David Halle

  132
  Citations

• Stresses in diamond-like carbon films

  Alfred Grill;Vishnubhai Patel

  123
  Citations

• EELS analysis of hydrogenated diamond-like carbon films

  L Ponsonnet;C Donnet;K Varlot;J.M Martin

  117
  Citations

• Tribological properties of diamond-like carbon and related materials

  A. Grill;V. Patel

  112
  Citations

• Method and materials for integration of fluorine-containing low-k dielectrics

  Alfred Grill;Christopher Jahnes;Vishnubhai Patel;Katherine Saenger

  112
  Citations

• Novel Low k Dielectrics Based on Diamondlike Carbon Materials

  A. Grill;V. Patel;C. Jahnes

  110
  Citations