Vishnubhai Vitthalbhai Patel

Best Publications

• Hydrogenated oxidized silicon carbon material

  Alfred Grill;Christopher Vincent Jahnes;Vishnubhai Vitthalbhai Patel;Laurent Claude Perraud

  509
  Citations

• Picosecond optical studies of amorphous diamond and diamondlike carbon: Thermal conductivity and longitudinal sound velocity

  Christopher J. Morath;Humphrey J. Maris;Jerome J. Cuomo;David L. Pappas

  295
  Citations

• LOW DIELECTRIC CONSTANT FILMS PREPARED BY PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION FROM TETRAMETHYLSILANE

  A. Grill;V. Patel

  275
  Citations

• Plating of noble metal electrodes for DRAM and FRAM

  Panayotis Constantinou Andricacos;James Hartfiel Comfort;Alfred Grill;David Edward Kotecki

  264
  Citations

• Dual damascene processing for semiconductor chip interconnects

  Alfred Grill;John Patrick Hummel;Christopher Vincent Jahnes;Vishnubhai Vitthalbhai Patel

  261
  Citations

• An ultralow dielectric constant material as an int

  Gates Stephen M;Grill Alfred;Medeiros David;Neumayer Deborah A

  243
  Citations

• Multiphase low dielectric constant material

  Alfred Grill;Vishnubhai Vitthalbhai Patel;Stephen McConnell Gates

  223
  Citations

• Optical and tribological properties of heat-treated diamond-like carbon

  A. Grill;V. Patel;B. S. Meyerson

  173
  Citations

• The respective role of oxygen and water vapor on the tribology of hydrogenated diamond-like carbon coatings

  C. Donnet;T. Le Mogne;L. Ponsonnet;M. Belin

  167
  Citations

• Inhomogeneous carbon bonding in hydrogenated amorphous carbon films

  A. Grill;B. S. Meyerson;V. V. Patel;J. A. Reimer

  165
  Citations

• Diamondlike carbon films by rf plasma-assisted chemical vapor deposition from acetylene

  A. Grill;B. S. Meyerson;V. V. Patel

  160
  Citations

• Multiphase low dielectric constant material and method of deposition

  Alfred Grill;Vishnubhai Vitthalbhai Patel;Stephen McConnell Gates

  160
  Citations

• Ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device containing the same

  Alfred Grill;David R. Medeiros;Vishnubhai V. Patel

  138
  Citations

• Porosity in plasma enhanced chemical vapor deposited SiCOH dielectrics: A comparative study

  A. Grill;V. Patel;K. P. Rodbell;E. Huang

  135
  Citations

• Tunable vapor deposited materials as antireflective coatings, hardmasks and as combined antireflective coating/hardmasks and methods of fabrication thereof and applications thereof

  Marie Angelopoulos;Katherina Babich;Alfred Grill;Scott David Halle

  132
  Citations

• Stresses in diamond-like carbon films

  Alfred Grill;Vishnubhai Patel

  123
  Citations

• EELS analysis of hydrogenated diamond-like carbon films

  L Ponsonnet;C Donnet;K Varlot;J.M Martin

  117
  Citations

• Tribological properties of diamond-like carbon and related materials

  A. Grill;V. Patel

  112
  Citations

• Method and materials for integration of fluorine-containing low-k dielectrics

  Alfred Grill;Christopher Jahnes;Vishnubhai Patel;Katherine Saenger

  112
  Citations

• Novel Low k Dielectrics Based on Diamondlike Carbon Materials

  A. Grill;V. Patel;C. Jahnes

  110
  Citations