World's Best Scientists 2026 revealed!
Vishnubhai Vitthalbhai Patel

Vishnubhai Vitthalbhai Patel

D-Index & Metrics

Materials Science

D-Index
47
Citations
6677
World Ranking
11256
National Ranking
2640

Best Publications

  • Hydrogenated oxidized silicon carbon material

    Alfred Grill;Christopher Vincent Jahnes;Vishnubhai Vitthalbhai Patel;Laurent Claude Perraud

  • Picosecond optical studies of amorphous diamond and diamondlike carbon: Thermal conductivity and longitudinal sound velocity

    Christopher J. Morath;Humphrey J. Maris;Jerome J. Cuomo;David L. Pappas

  • LOW DIELECTRIC CONSTANT FILMS PREPARED BY PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION FROM TETRAMETHYLSILANE

    A. Grill;V. Patel

  • Plating of noble metal electrodes for DRAM and FRAM

    Panayotis Constantinou Andricacos;James Hartfiel Comfort;Alfred Grill;David Edward Kotecki

  • Dual damascene processing for semiconductor chip interconnects

    Alfred Grill;John Patrick Hummel;Christopher Vincent Jahnes;Vishnubhai Vitthalbhai Patel

  • An ultralow dielectric constant material as an int

    Gates Stephen M;Grill Alfred;Medeiros David;Neumayer Deborah A

  • Multiphase low dielectric constant material

    Alfred Grill;Vishnubhai Vitthalbhai Patel;Stephen McConnell Gates

  • Optical and tribological properties of heat-treated diamond-like carbon

    A. Grill;V. Patel;B. S. Meyerson

  • The respective role of oxygen and water vapor on the tribology of hydrogenated diamond-like carbon coatings

    C. Donnet;T. Le Mogne;L. Ponsonnet;M. Belin

  • Inhomogeneous carbon bonding in hydrogenated amorphous carbon films

    A. Grill;B. S. Meyerson;V. V. Patel;J. A. Reimer

  • Diamondlike carbon films by rf plasma-assisted chemical vapor deposition from acetylene

    A. Grill;B. S. Meyerson;V. V. Patel

  • Multiphase low dielectric constant material and method of deposition

    Alfred Grill;Vishnubhai Vitthalbhai Patel;Stephen McConnell Gates

  • Ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device containing the same

    Alfred Grill;David R. Medeiros;Vishnubhai V. Patel

  • Porosity in plasma enhanced chemical vapor deposited SiCOH dielectrics: A comparative study

    A. Grill;V. Patel;K. P. Rodbell;E. Huang

  • Tunable vapor deposited materials as antireflective coatings, hardmasks and as combined antireflective coating/hardmasks and methods of fabrication thereof and applications thereof

    Marie Angelopoulos;Katherina Babich;Alfred Grill;Scott David Halle

  • Stresses in diamond-like carbon films

    Alfred Grill;Vishnubhai Patel

  • EELS analysis of hydrogenated diamond-like carbon films

    L Ponsonnet;C Donnet;K Varlot;J.M Martin

  • Tribological properties of diamond-like carbon and related materials

    A. Grill;V. Patel

  • Method and materials for integration of fluorine-containing low-k dielectrics

    Alfred Grill;Christopher Jahnes;Vishnubhai Patel;Katherine Saenger

  • Novel Low k Dielectrics Based on Diamondlike Carbon Materials

    A. Grill;V. Patel;C. Jahnes

Frequent Co-Authors

Alfred Grill
Alfred Grill IBM (United States)
Christopher V. Jahnes
Christopher V. Jahnes IBM (United States)
Bernard S. Meyerson
Bernard S. Meyerson IBM (United States)
Katherine L. Saenger
Katherine L. Saenger Auburn University
Daniel C. Edelstein
Daniel C. Edelstein IBM (United States)
Michael John Brady
Michael John Brady Tufts University
John A. Ott
John A. Ott IBM (United States)
Michael F. Toney
Michael F. Toney University of Colorado Boulder
Gary W. Rubloff
Gary W. Rubloff University of Maryland, College Park
Robert D. Miller
Robert D. Miller Stanford University

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Best Scientists Citing Vishnubhai Vitthalbhai Patel