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Materials Science

D-Index
49
Citations
6683
World Ranking
10682
National Ranking
2522

Overview

Thomas H. Baum is affiliated with IBM in the United States, focusing on research in engineering and materials science. Their work primarily intersects the fields of Electrical and Electronic Engineering and Materials Chemistry.

They have published on topics related to semiconductor materials and devices, ferroelectric and negative capacitance devices, as well as the electronic and structural properties of oxides.

  • Semiconductor materials and devices
  • Ferroelectric and Negative Capacitance Devices
  • Electronic and Structural Properties of Oxides

Thomas H. Baum's recent scholarly contributions include the paper titled Selective ALD of SiN using SiI4 and NH3: The effect of temperature, plasma treatment, and oxide underlayer, published in 2020 in the Journal of Vacuum Science & Technology A Vacuum Surfaces and Films.

  • Selective ALD of SiN using SiI4 and NH3: The effect of temperature, plasma treatment, and oxide underlayer (2020), Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Their frequent coauthors include Han Wang and B. C. Hendrix, indicating collaboration within specialized domains of materials and surface sciences.

  • Han Wang
  • B. C. Hendrix

Their publications have appeared in focused scientific venues, notably in the Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, where they have contributed research work related to thin film technologies and surface modification techniques.

  • Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Best Publications

  • Chemical mechanical polishing of feram capacitors

    Buskirk Peter C. Van;Michael W. Russell;Steven M. Bilodeau;Thomas H. Baum

  • Method of forming metal films on a substrate by chemical vapor deposition

    Robin A. Gardiner;Peter S. Kirlin;Thomas H. Baum;Douglas Gordon

  • Apparatus and process for sensing fluoro species in semiconductor processing systems

    Frank Dimeo;Philip S H Chen;Jeffrey W Neuner;James Welch

  • Supercritical fluid-assisted deposition of materials on semiconductor substrates

    Chongying Xu;Thomas H. Baum;Michael B. Korzenski

  • Micro-machined thin film sensor arrays for the detection of H2, NH3, and sulfur containing gases, and method of making and using the same

    Frank DiMeo;Thomas Baum

  • Chemical vapor deposition of copper from 1,5‐cyclooctadiene copper(I) hexafluoroacetylacetonate

    Scott K. Reynolds;Christopher J. Smart;Emil F. Baran;Thomas H. Baum

  • Laser chemical vapor deposition of copper

    F. A. Houle;C. R. Jones;T. Baum;C. Pico

  • Composition control of Hf1−xSixO2 films deposited on Si by chemical-vapor deposition using amide precursors

    B. C. Hendrix;A. S. Borovik;C. Xu;J. F. Roeder

  • Laser chemical vapor deposition of gold

    Thomas H. Baum;Carol R. Jones

  • Liquid delivery MOCVD process for deposition of high frequency dielectric materials

    Gregory T. Stauf;Jeffrey F. Roeder;Thomas H. Baum

  • Composition and method for low temperature deposition of silicon-containing films such as films including silicon, silicon nitride, silicon dioxide and/or silicon-oxynitride

    Ziyun Wang;Chongying Xu;Ravi K. Laxman;Thomas H. Baum

  • Hydrogen sensor utilizing rare earth metal thin film detection element

    Gautam Bhandari;Thomas H. Baum

  • Compositions and structures for chemical mechanical polishing of FeRAM capacitors and method of fabricating FeRAM capacitors using same

    Peter C. Van Buskirk;Michael W. Russell;Steven M. Bilodeau;Thomas H. Baum

  • Photochemical generation and deposition of copper from a gas phase precursor

    C. R. Jones;F. A. Houle;C. A. Kovac;T. H. Baum

  • Composition and process for post-etch removal of photoresist and/or sacrificial anti-reflective material deposited on a substrate

    Melissa K. Rath;David D. Bernhard;David Minsek;Michael B. Korzenski

  • Laser‐induced chemical vapor deposition of aluminum

    Thomas H. Baum;Carl E. Larson;Robert L. Jackson

  • Chemical Vapor Deposition of Copper for IC Metallization: Precursor Chemistry and Molecular Structure

    Pascal Doppelt;Thomas H. Baum

  • A novel copper complex and CVD precursor: (.eta.2-butyne)copper(I) hexafluoroacetylacetonate

    Thomas H. Baum;Carl E. Larson

  • Aerosol flow reactor production of fine Y1Ba2Cu3O7 powder: Fabrication of superconducting ceramics

    T. T. Kodas;E. M. Engler;V. Y. Lee;R. Jacowitz

  • Removal of mems sacrificial layers using supercritical fluid/chemical formulations

    Michael B. Korzenski;Thomas H. Baum;Chongying Xu;Eliodor G. Ghenciu

  • Compositions and methods for selective removal of metal or metal alloy after metal silicide formation

    David D. Bernhard;Weihua Wang;Thomas H. Baum

Frequent Co-Authors

Scott K. Reynolds
Scott K. Reynolds IBM (United States)
Arnold L. Rheingold
Arnold L. Rheingold University of California, San Diego
Mark R. Visokay
Mark R. Visokay Texas Instruments (United States)
Rainer Waser
Rainer Waser RWTH Aachen University
Toivo T. Kodas
Toivo T. Kodas Cabot (United States)
Angus I. Kingon
Angus I. Kingon Brown University
Luigi Colombo
Luigi Colombo The University of Texas at Dallas
George K. Wong
George K. Wong Hong Kong University of Science and Technology
James Economy
James Economy University of Illinois at Urbana-Champaign
Tobin J. Marks
Tobin J. Marks Northwestern University

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