M.-A. Nicolet

Research.com Recognitions

• 1972 - Member of the National Academy of Sciences
• 1962 - Fellow of American Geophysical Union (AGU)

Overview

Best Publications

• Diffusion barriers in thin films

  M.-A. Nicolet

  1006
  Citations

• Formation and Characterization of Transition-Metal Silicides

  Marc-A. Nicolet;S.S. Lau

  445
  Citations

• When is thermodynamics relevant to ion-induced atomic rearrangements in metals?

  W. L. Johnson;Y. T. Cheng;M. Van Rossum;M. A. Nicolet

  438
  Citations

• Principles and applications of ion beam techniques for the analysis of solids and thin films

  W.K. Chu;J.W. Mayer;M-A. Nicolet;T.M. Buck

  420
  Citations

• Reaction of thin metal films with SiO2 substrates

  R. Pretorius;J. M. Harris;M. A. Nicolet

  413
  Citations

• Tantalum‐based diffusion barriers in Si/Cu VLSI metallizations

  E. Kolawa;J. S. Chen;J. S. Reid;P. J. Pokela

  323
  Citations

• Structural difference rule for amorphous alloy formation by ion mixing

  Bai‐Xin Liu;W. L. Johnson;M‐A. Nicolet;S. S. Lau

  280
  Citations

• Evaluation of amorphous (Mo, Ta, W)SiN diffusion barriers for 〈Si〉|Cu metallizations

  J.S. Reid;E. Kolawa;R.P. Ruiz;M.-A. Nicolet

  265
  Citations

• Influence of the nature of the Si substrate on nickel silicide formed from thin Ni films

  J.O. Olowolafe;M.-A. Nicolet;J.W. Mayer

  255
  Citations

• LOW‐TEMPERATURE MIGRATION OF SILICON IN THIN LAYERS OF GOLD AND PLATINUM

  A. Hiraki;M. A. Nicolet;J. W. Mayer

  246
  Citations

• Leitfähige Barriereschicht aus einer Legierung von Edelmetall und Isolator als Elektroden für Material mit hohen dielektrischen Konstanten

  Scott R Summerfelt;Jason Reid;Marc Nicolet;Elzbieta Kolawa

  220
  Citations

• Influence of chemical driving forces in ion mixing of metallic bilayers

  Y. T. Cheng;M. Van Rossum;M. A. Nicolet;W. L. Johnson

  204
  Citations

• Kinetics of TiSi2 formation by thin Ti films on Si

  L. S. Hung;J. Gyulai;J. W. Mayer;S. S. Lau

  194
  Citations

• An improved forward I-V method for nonideal Schottky diodes with high series resistance

  C.-D. Lien;F.C.T. So;M.-A. Nicolet

  190
  Citations

• Properties of reactively sputter-deposited TaN thin films

  Xin Sun;Elzbieta Kolawa;Jen Sue Chen;Jason S. Reid

  185
  Citations

• Amorphization of Hf-Ni films by solid-state reaction

  M. van Rossum;M. A. Nicolet;W. L. Johnson

  179
  Citations

• Low-Temperature Ion Beam Mixing in Metals

  S. J. Kim;M. A. Nicolet;Robert S Averback;Robert S Averback;D. Peak

  164
  Citations

• Reactively sputtered Ti-Si-N films I. Physical properties

  X. Sun;J. S. Reid;E. Kolawa;M.-A. Nicolet

  162
  Citations

• Compensating impurity effect on epitaxial regrowth rate of amorphized Si

  I. Suni;G. Göltz;M. G. Grimaldi;M. A. Nicolet

  159
  Citations

• Iron silicide thin film formation at low temperatures

  S.S. Lau;J.S.-Y. Feng;J.O. Olowolafe;M.-A. Nicolet

  153
  Citations

• 2 – Backscattering Spectrometry

  G. Foti;J.W. Mayer;E. Rimini;S.U. Campisano

  28
  Citations