Reinoud F. Wolffenbuttel

Best Publications

• SURFACE MICROMACHINED TUNEABLE INTERFEROMETER ARRAY

  K. Aratani;P. J. French;P. M. Sarro;D. Poenar

  360
  Citations

• State-of-the-art in integrated optical microspectrometers

  R.F. Wolffenbuttel

  280
  Citations

• MEMS-based optical mini- and microspectrometers for the visible and infrared spectral range

  R F Wolffenbuttel

  254
  Citations

• Low-temperature intermediate Au-Si wafer bonding; eutectic or silicide bond

  R.F. Wolffenbuttel

  254
  Citations

• Low-temperature silicon wafer-to-wafer bonding using gold at eutectic temperature

  R.F. Wolffenbuttel;K.D. Wise

  251
  Citations

• Optimization of a low-stress silicon nitride process for surface-micromachining applications

  P.J French;P.M Sarro;R Mallée;E.J.M Fakkeldij

  237
  Citations

• Process and design considerations for surface micromachined beams for a tuneable interferometer array in silicon

  K. Aratani;P.J. French;P.M. Sarro;R.F. Wolffenbuttel

  227
  Citations

• Modeling the mechanical behavior of bulk-micromachined silicon accelerometers

  R.P. van Kampen;R.F. Wolffenbuttel

  189
  Citations

• Comparison of techniques for measuring both compressive and tensile stress in thin films

  B.P. van Drieënhuizen;J.F.L. Goosen;P.J. French;R.F. Wolffenbuttel

  186
  Citations

• Design and implementation of a sub-nm resolution microspectrometer based on a Linear-Variable Optical Filter

  Arvin Emadi;Huaiwen Wu;Ger de Graaf;Reinoud Wolffenbuttel

  173
  Citations

• Infrared micro-spectrometer based on a diffraction grating

  S.H. Kong;D.D.L. Wijngaards;R.F. Wolffenbuttel

  163
  Citations

• Bulk-micromachined tunable fabry–perot microinterferometer for the visible spectral range

  J.H. Correia;M. Bartek;R.F. Wolffenbuttel

  110
  Citations

• Single-chip CMOS optical microspectrometer

  J.H. Correia;G. de Graaf;S.H. Kong;M. Bartek

  110
  Citations

• Silicon sensors and circuits : on-chip compatibility

  R.F. Wolffenbuttel

  102
  Citations

• INTEGRATED GRATING/DETECTOR ARRAY FABRICATED IN SILICON USING MICROMACHINING TECHNIQUES

  T. A. Kwa;R. F. Wolffenbuttel

  97
  Citations

• Design and fabrication of on-chip integrated polySiGe and polySi Peltier devices

  D.D.L Wijngaards;S.H Kong;M Bartek;R.F Wolffenbuttel

  96
  Citations

• Analysis and analytical modeling of static pull-In with application to MEMS-based voltage reference and process monitoring

  L.A. Rocha;E. Cretu;R.F. Wolffenbuttel

  93
  Citations

• Application of electrostatic feedback to critical damping of an integrated silicon capacitive accelerometer

  R.P. van Kampen;M.J. Vellekoop;P.M. Sarro;R.F. Wolffenbuttel

  90
  Citations

• Vacuum sealing of microcavities using metal evaporation

  M. Bartek;J.A. Foerster;R.F. Wolffenbuttel

  89
  Citations

• Capacitance-to-phase angle conversion for the detection of extremely small capacities

  Reinoud F. Wolffenbuttel;Paul P. L. Regtien

  84
  Citations

• The development of a low-stress polysilicon process compatible with standard device processing

  P.J. French;B.P. van Drieenhuizen;D. Poenar;J.F.L. Goosen

  82
  Citations