P.J. French

Best Publications

• Polysilicon: a versatile material for microsystems

  P.J. French

  233
  Citations

• Piezoresistance in polysilicon and its applications to strain gauges

  Unknown

  189
  Citations

• Comparison of techniques for measuring both compressive and tensile stress in thin films

  B.P. van Drieënhuizen;J.F.L. Goosen;P.J. French;R.F. Wolffenbuttel

  186
  Citations

• Characterizing size-dependent effective elastic modulus of silicon nanocantilevers using electrostatic pull-in instability

  H. Sadeghian;C.K. Yang;J.F.L. Goosen;E. Van der Drift

  181
  Citations

• Sensors with digital or frequency output

  S. Middelhoek;P.J. French;J.H. Huijsing;W.J. Lian

  168
  Citations

• Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications

  E.J. Connolly;G.M. O’Halloran;H.T.M. Pham;P.M. Sarro

  166
  Citations

• Modified Reynolds equation and analytical analysis of squeeze-film air damping of perforated structures

  Unknown

  141
  Citations

• Advances in cochlear implants

  Unknown

  138
  Citations

• Polyimide sacrificial layer and novel materials for post-processing surface micromachining

  A Bagolini;L Pakula;T L M Scholtes;H T M Pham

  133
  Citations

• Galvanic porous silicon formation without external contacts

  C.M.A Ashruf;P.J French;P.M.M.C Bressers;J.J Kelly

  122
  Citations

• Fabrication of a CMOS compatible pressure sensor for harsh environments

  L S Pakula;H Yang;H T M Pham;P J French

  112
  Citations

• Galvanic Cell Formation in Silicon/Metal Contacts: The Effect on Silicon Surface Morphology

  X. H. Xia;C. M. A. Ashruf;P. J. French;J. J. Kelly

  109
  Citations

• A porous SiC ammonia sensor

  E.J. Connolly;B.H. Timmer;H.T.M. Pham;J. Groeneweg

  107
  Citations

• The piezojunction effect in silicon sensors and circuits and its relation to piezoresistance

  J.F. Creemer;F. Fruett;G.C.M. Meijer;P.J. French

  100
  Citations

• Precision in harsh environments

  Paddy French;Gijsbertus J.M. Krijnen;Fred Roozeboom

  99
  Citations

• Sensors for Catheter Applications

  P. J. French;D. Tanase;J. F. L. Goosen

  88
  Citations

• Temperature influence on etching deep holes with SF6/O2 cryogenic plasma

  G Craciun;M A Blauw;E van der Drift;P M Sarro

  84
  Citations

• The development of a low-stress polysilicon process compatible with standard device processing

  P.J. French;B.P. van Drieenhuizen;D. Poenar;J.F.L. Goosen

  82
  Citations

• Advanced time-multiplexed plasma etching of high aspect ratio silicon structures

  M. A. Blauw;G. Craciun;W. G. Sloof;P. J. French

  80
  Citations

• Effects of size and defects on the elasticity of silicon nanocantilevers

  Unknown

  79
  Citations