Randhir P. S. Thakur

Research.com Recognitions

• 2013 - IEEE Fellow For leadership in development and implementation of single-wafer technology in semiconductor manufacturing

Overview

Best Publications

• Methods for forming a high dielectric film

  Scott J. Deboer;Randhir P. S. Thakur

  343
  Citations

• Method and apparatus for reducing isolation stress in integrated circuits

  Randhir P. S. Thakur;Kevin G. Donohoe;Zhiqiang Wu;Alan R. Reinberg

  202
  Citations

• Method for forming enhanced capacitance stacked capacitor structures using hemi-spherical grain polysilicon

  Charles H. Dennison;Randhir P. S. Thakur

  196
  Citations

• Method for efficient manufacturing of integrated circuits

  Lyle Breiner;Randhir P. S. Thakur

  196
  Citations

• Semiconductor structure having a doped conductive layer

  Yongjun Hu;Pai-Hung Pan;Er-Xuan Ping;Randhir P. S. Thakur

  174
  Citations

• Method to prepare hemi-spherical grain (HSG) silicon using a fluorine based gas mixture and high vacuum anneal

  Randhir P. S. Thakur

  147
  Citations

• Method of manufacturing small geometry MOS field-effect transistors having improved barrier layer to hot electron injection

  Aftab Ahmad;Randhir P. S. Thakur

  135
  Citations

• Method of forming capacitors containing tantalum

  Scott Jeffrey DeBoer;F. Daniel Gealy;Randhir P. S. Thakur

  118
  Citations

• Forming a conductive structure in a semiconductor device

  Ronald A. Weimer;Yongjun Jeff Hu;Pai Hung Pan;Deepa Ratakonda

  117
  Citations

• Method for forming hemispherical grained silicon

  Ronald A. Weimer;Randhir P. S. Thakur;Avishai Kepten;Michael Sendler

  111
  Citations

• Method for cleaning semiconductor wafers

  Randhir P. S. Thakur

  111
  Citations

• Method to form hemi-spherical grain (HSG) silicon from amorphous silicon

  Randhir P. S. Thakur;Lyle D. Breiner

  102
  Citations

• Method to form hemi-spherical grain (HSG) silicon

  Randhir P. S. Thakur;Lyle D. Breiner

  102
  Citations

• Control and 3-dimensional simulation model of temperature variations in a rapid thermal processing machine

  Randhir P. S. Thakur

  97
  Citations

• Semiconductor processing method of providing a conductively doped layer of hemispherical grain polysilicon and a hemispherical grain polysilicon layer produced according to the method

  John K. Zahurak;Klaus F. Schuegraf;Randhir P.S. Thakur

  96
  Citations

• Capacitor/antifuse structure having a barrier-layer electrode and improved barrier layer

  Randhir P. S. Thakur;Garry A. Mercaldi;Michael Nuttall

  96
  Citations

• Method for forming a self-aligned isolation structure utilizing sidewall spacers as an etch mask and remaining as a portion of the isolation structure

  Fernando Gonzalez;David L. Chapek;Randhir P. S. Thakur

  90
  Citations

• Some photoeffect roles in rapid isothermal processing

  R. Singh;S. Sinha;R. P. S. Thakur;P. Chou

  89
  Citations

• Method for fabricating stacked layer Si3 N4 for low leakage high capacitance films using rapid thermal nitridation

  Gurtej S. Sandhu;Randhir P. S. Thakur

  87
  Citations

• Somatic embryogenesis and its conver- sion into plantlets in a multipurpose bamboo, Dendrocalamus hamiltonii Nees et Arn. Ex Munro

  S Godbole;A Sood;R Thakur;Mohit Sharma

  87
  Citations