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Materials Science

D-Index
49
Citations
8235
World Ranking
10585
National Ranking
2511

Overview

Jane P. Chang is affiliated with the University of California, Los Angeles in the United States. Their research primarily focuses on engineering and materials science, with significant contributions in electrical and electronic engineering, materials chemistry, and electronic, optical, and magnetic materials. Additionally, their work spans fields related to surgery and biomedical engineering.

Their publications cover a range of topics, prominently including semiconductor materials and devices, plasma diagnostics and applications, bladder and urothelial cancer treatments, advancements in semiconductor devices and circuit design, copper interconnects and reliability, magnetic properties and applications, and nanowire synthesis and applications.

Jane P. Chang has published extensively in several scholarly journals. Frequent publication venues include:

  • Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
  • Applied Physics Letters
  • Journal of Clinical Oncology
  • Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
  • ECS Meeting Abstracts

Selected recent papers authored or co-authored by Jane P. Chang comprise:

  • Future of plasma etching for microelectronics: Challenges and opportunities (2024), Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
  • Dry etching in the presence of physisorption of neutrals at lower temperatures (2023), Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
  • Underlayer effect on the soft magnetic, high frequency, and magnetostrictive properties of FeGa thin films (2020), Journal of Applied Physics
  • Enhancing the soft magnetic properties of FeGa with a non-magnetic underlayer for microwave applications (2020), Applied Physics Letters
  • Physical and chemical effects in directional atomic layer etching (2020), Journal of Physics D Applied Physics

Frequent co-authors in their research collaborations include Xia Sang, Ryan Sheil, Adrian Acosta, Anthony Eccleston, and Julia Brinkmann.

Best Publications

  • Development of hafnium based high-k materials—A review

    J.H. Choi;Y. Mao;J.P. Chang

  • Infrared spectroscopic analysis of the Si/SiO2 interface structure of thermally oxidized silicon

    K. T. Queeney;M. K. Weldon;J. P. Chang;Y. J. Chabal

  • Dielectric property and thermal stability of HfO2 on silicon

    Y.-S. Lin;R. Puthenkovilakam;J. P. Chang

  • Electrical performance of Al2O3 gate dielectric films deposited by atomic layer deposition on 4H-SiC

    Carey M. Tanner;Ya-Chuan Perng;Christopher Frewin;Stephen E. Saddow

  • In situ Control of Atomic-Scale Si Layer with Huge Strain in the Nanoheterostructure NiSi/Si/NiSi through Point Contact Reaction

    Kuo Chang Lu;Wen-Wei Wu;Han Wei Wu;Carey M. Tanner

  • Kinetic study of low energy argon ion-enhanced plasma etching of polysilicon with atomic/molecular chlorine

    Jane P. Chang;John C. Arnold;Gavin C. H. Zau;Hyung-Shik Shin

  • Synthesis and Luminescence Properties of Erbium-Doped Y2O3 Nanotubes

    Yuanbing Mao;Jian Y. Huang;Roman Ostroumov;Kang L. Wang

  • First-principles exploration of alternative gate dielectrics: Electronic structure of ZrO 2 /Si and ZrSiO 4 /Si interfaces

    Ragesh Puthenkovilakam;Emily A. Carter;Jane P. Chang

  • Profiling nitrogen in ultrathin silicon oxynitrides with angle-resolved x-ray photoelectron spectroscopy

    J. P. Chang;J. P. Chang;M. L. Green;V. M. Donnelly;R. L. Opila

  • Active layer-incorporated, spectrally tuned Au/SiO2 core/shell nanorod-based light trapping for organic photovoltaics.

    Vladan Janković;Yang (Michael) Yang;Jingbi You;Letian Dou

  • Dielectric property and conduction mechanism of ultrathin zirconium oxide films

    J. P. Chang;Y.-S. Lin

  • Plasma-surface kinetics and feature profile evolution in chlorine etching of polysilicon

    Jane P. Chang;Arpan P. Mahorowala;Herbert H. Sawin

  • Luminescence of Nanocrystalline Erbium-Doped Yttria

    Yuanbing Mao;Thai Tran;Xia Guo;Jian Y. Huang

  • Mechanical Shuttling of Linear Motor-Molecules in Condensed Phases on Solid Substrates

    Tony Jun Huang;Hsian Rong Tseng;Lin Sha;Weixing Lu

  • An accurate determination of barrier heights at the HfO2∕Si interfaces

    Ragesh Puthenkovilakam;Jane P. Chang

  • Rapid thermal chemical vapor deposition of zirconium oxide for metal-oxide-semiconductor field effect transistor application

    Jane P. Chang;You-Sheng Lin;Karen Chu

  • Enhancement of voltage-controlled magnetic anisotropy through precise control of Mg insertion thickness at CoFeB|MgO interface

    Xiang Li;Kevin Fitzell;Di Wu;Di Wu;C. Ty Karaba

  • Controlled nano-doping of ultra thin films

    Jane P. Chang;Trinh Tu Van;Tony Chiang;Chandra Deshpandey

  • Ultrathin zirconium oxide films as alternative gate dielectrics

    J. P. Chang;Y. S. Lin;S. Berger;A. Kepten

  • Valence band structure and band alignment at the ZrO2/Si interface

    Ragesh Puthenkovilakam;Jane P. Chang

  • Highly conformal ZrO2 deposition for dynamic random access memory application

    Jane P. Chang;You-Sheng Lin

  • Microfabricated thermal conductivity detector for the micro-ChemLab™

    D. Cruz;D. Cruz;J.P. Chang;S.K. Showalter;F. Gelbard

Frequent Co-Authors

Kang L. Wang
Kang L. Wang University of California, Los Angeles
Robert L. Opila
Robert L. Opila University of Delaware
John R. Bargar
John R. Bargar SLAC National Accelerator Laboratory
Yuanbing Mao
Yuanbing Mao Illinois Institute of Technology
Michael F. Toney
Michael F. Toney University of Colorado Boulder
Sarah H. Tolbert
Sarah H. Tolbert University of California, Los Angeles
Bruce Dunn
Bruce Dunn University of California, Los Angeles
Gregory P. Carman
Gregory P. Carman University of California, Los Angeles
Jun Lu
Jun Lu Zhejiang University
Kuo-Chuan Ho
Kuo-Chuan Ho National Taiwan University

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