His primary areas of investigation include Optoelectronics, Anodic bonding, Surface activated bonding, Composite material and Wafer bonding. The study incorporates disciplines such as Thin film, Nanotechnology, Wire bonding, Piezoelectricity and Cantilever in addition to Optoelectronics. His Anodic bonding research incorporates themes from Reactive-ion etching, Thermocompression bonding and Direct bonding.
Tadatomo Suga combines subjects such as Amorphous solid, Crystallography, Chemical-mechanical planarization, Surface roughness and Electronic engineering with his study of Surface activated bonding. His Composite material study incorporates themes from Mineralogy and Anisotropy. The concepts of his Wafer bonding study are interwoven with issues in Fluidics, Annealing, p–n junction and Analytical chemistry.
His main research concerns Composite material, Surface activated bonding, Optoelectronics, Anodic bonding and Wafer. The study of Composite material is intertwined with the study of Metallurgy in a number of ways. His research investigates the connection with Surface activated bonding and areas like Chemical engineering which intersect with concerns in Fullerene.
His studies examine the connections between Optoelectronics and genetics, as well as such issues in Piezoelectricity, with regards to Cantilever. His Anodic bonding research includes themes of Bonding in solids, Wafer bonding, Thermocompression bonding and Direct bonding. His Direct bonding study combines topics in areas such as Plasma activation and Formic acid.
Tadatomo Suga mainly focuses on Surface activated bonding, Composite material, Wafer bonding, Optoelectronics and Wafer. Tadatomo Suga has included themes like Bond energy, Chemical engineering and Analytical chemistry in his Surface activated bonding study. His research in Composite material intersects with topics in Silicon and Direct bonding.
As a member of one scientific family, Tadatomo Suga mostly works in the field of Wafer bonding, focusing on Annealing and, on occasion, Amorphous solid. The various areas that Tadatomo Suga examines in his Optoelectronics study include Thin film, Thermal conductivity and Diamond. He has researched Anodic bonding in several fields, including Bonding in solids, Substrate, Thermocompression bonding and Polymer.
His primary scientific interests are in Surface activated bonding, Composite material, Anodic bonding, Optoelectronics and Wafer bonding. His Surface activated bonding research integrates issues from Hydrogen, Thermal conductivity, Polishing, Ion beam and Chemical engineering. His Composite material research is multidisciplinary, relying on both Metallurgy, Dielectric and Direct bonding.
His Anodic bonding study integrates concerns from other disciplines, such as Intermediate layer and Thermocompression bonding. His studies in Optoelectronics integrate themes in fields like Thin film, Substrate, Diamond and Electronics. The study incorporates disciplines such as Bond energy, Epitaxy, Annealing, Rapid thermal annealing and Nano- in addition to Wafer bonding.
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Surface activated bonding of silicon wafers at room temperature
H. Takagi;K. Kikuchi;R. Maeda;T. R. Chung.
Applied Physics Letters (1996)
Method for manufacturing an interconnect structure for stacked semiconductor device
Suga Tadatomo.
(2001)
Room temperature Cu-Cu direct bonding using surface activated bonding method
T. H. Kim;M. M. R. Howlader;T. Itoh;T. Suga.
Journal of Vacuum Science and Technology (2003)
Structure of AlAl and AlSi3N4 interfaces bonded at room temperature by means of the surface activation method
T. Suga;Y. Takahashi;H. Takagi;B. Gibbesch.
Acta Metallurgica Et Materialia (1992)
Self-excited piezoelectric PZT microcantilevers for dynamic SFM—with inherent sensing and actuating capabilities
Chengkuo Lee;Toshihiro Itoh;Tadatomo Suga.
Sensors and Actuators A-physical (1999)
Effect of Surface Roughness on Room-Temperature Wafer Bonding by Ar Beam Surface Activation
Hideki Takagi;Ryutaro Maeda;Teak Ryong Chung;Naoe Hosoda.
Japanese Journal of Applied Physics (1998)
Development of a force sensor for atomic force microscopy using piezoelectric thin films
T Itoh;T Suga.
Nanotechnology (1993)
Composite Parameters and Mechanical Compatibility of Material Joints
T. Suga;G. Elssner;S. Schmauder.
Journal of Composite Materials (1988)
Low-temperature direct bonding of silicon and silicon dioxide by the surface activation method
Hideki Takagi;Ryutaro Maeda;Teak Ryong Chung;Tadatomo Suga.
Sensors and Actuators A-physical (1998)
Low-Temperature Bonding of Laser Diode Chips on Silicon Substrates Using Plasma Activation of Au Films
E. Higurashi;T. Imamura;T. Suga;R. Sawada.
IEEE Photonics Technology Letters (2007)
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