Mehran Mehregany

Overview

Best Publications

• Nanodevice motion at microwave frequencies

  Xue Ming Henry Huang;Christian A. Zorman;Mehran Mehregany;Michael L. Roukes

  820
  Citations

• Silicon carbide MEMS for harsh environments

  M. Mehregany;C.A. Zorman;N. Rajan;Chien Hung Wu

  595
  Citations

• Monocrystalline silicon carbide nanoelectromechanical systems

  Y. T. Yang;K. L. Ekinci;X. M H Huang;L. M. Schiavone

  413
  Citations

• SiC MEMS: Opportunities and challenges for applications in harsh environments

  Mehran Mehregany;Christian A Zorman

  400
  Citations

• Design and fabrication of broadband surface-micromachined micro-electro-mechanical switches for microwave and millimeter-wave applications

  Robert Y. Loo;Adele Schmitz;Julia Brown;Jonathan Lynch

  377
  Citations

• Microfabricated structures for the in situ measurement of residual stress, Young’s modulus, and ultimate strain of thin films

  Mark G. Allen;Mehran Mehregany;Roger T. Howe;Stephen D. Senturia

  360
  Citations

• Analysis of tip deflection and force of a bimetallic cantilever microactuator

  Wen Hwa Chu;Mehran Mehregany;Robert L. Mullen

  354
  Citations

• Microfabricated electrohydrodynamic pumps

  Stephen F. Bart;Lee S. Tavrow;Mehran Mehregany;Jefrey H. Lang

  326
  Citations

• Contact physics of gold microcontacts for MEMS switches

  Unknown

  299
  Citations

• Epitaxial growth of 3C–SiC films on 4 in. diam (100) silicon wafers by atmospheric pressure chemical vapor deposition

  Christian A. Zorman;Aaron Judah Fleischman;Andrew S. Dewa;Mehran Mehregany

  298
  Citations

• Thin-film processing of TiNi shape memory alloy

  J. A. Walker;K. J. Gabriel;Mehran Mehregany

  281
  Citations

• A SiC MEMS Resonant Strain Sensor for Harsh Environment Applications

  R.G. Azevedo;D.G. Jones;A.V. Jog;B. Jamshidi

  228
  Citations

• In situ friction and wear measurements in integrated polysilicon mechanisms

  K. J. Gabriel;K. J. Gabriel;F. Behi;F. Behi;R. Mahadevan;R. Mahadevan;Mehran Mehregany;Mehran Mehregany

  222
  Citations

• Integrated fabrication of polysilicon mechanisms

  Unknown

  217
  Citations

• Low Voltage Nanoelectromechanical Switches Based on Silicon Carbide Nanowires

  X. L. Feng;M. H. Matheny;C. A. Zorman;M. Mehregany

  203
  Citations

• Fabrication and testing of bulk micromachined silicon carbide piezoresistive pressure sensors for high temperature applications

  Chien-Hung Wu;C.A. Zorman;M. Mehregany

  191
  Citations

• Silicon carbide for microelectromechanical systems

  M. Mehregany;C.A. Zorman;S. Roy;A.J. Fleischman

  189
  Citations

• Mechanical properties of 3C silicon carbide

  Lijun Tong;Mehran Mehregany;Lawrence G. Matus

  185
  Citations

• VHF, UHF and microwave frequency nanomechanical resonators

  X. M. H. Huang;X. L. Feng;C. A. Zorman;M. Mehregany

  180
  Citations

• Performance impact of monolayer coating of polysilicon micromotors

  K. Deng;R.J. Collins;M. Mehregany;C.N. Sukenik

  177
  Citations

• A study of three microfabricated variable-capacitance motors

  Mehran Mehregany;S. F. Bart;L. S. Tavrow;J. H. Lang

  161
  Citations

• High-aspect-ratio photolithography for MEMS applications

  H. Miyajima;M. Mehregany

  157
  Citations