Stephen A. Campbell

Overview

Best Publications

• The Science and Engineering of Microelectronic Fabrication

  Stephen A. Campbell

  1648
  Citations

• MOSFET transistors fabricated with high permitivity TiO/sub 2/ dielectrics

  S.A. Campbell;D.C. Gilmer;Xiao-Chuan Wang;Ming-Ta Hsieh

  576
  Citations

• Titanium dioxide (TiO 2 )-based gate insulators

  S. A. Campbell;H.-S. Kim;D. C. Gilmer;B. He

  395
  Citations

• Chemical vapour deposition of the oxides of titanium, zirconium and hafnium for use as high‐k materials in microelectronic devices. A carbon‐free precursor for the …

  Unknown

  296
  Citations

• Imaging and phase identification of Cu2ZnSnS4 thin films using confocal Raman spectroscopy

  A. J. Cheng;M. Manno;A. Khare;Chris Leighton

  294
  Citations

• Fabrication Engineering at the Micro and Nanoscale

  Stephen A. Campbell

  289
  Citations

• Internal photoemission of electrons and holes from (100)Si into

  Unknown

  247
  Citations

• Doping efficiency, dopant location, and oxidation of Si nanocrystals

  X. D. Pi;R. Gresback;R. W. Liptak;S. A. Campbell

  245
  Citations

• Atmospheric hydrogen peroxide

  Unknown

  235
  Citations

• Leakage current and electrical breakdown in metal‐organic chemical vapor deposited TiO2 dielectrics on silicon substrates

  Hyeon Seag Kim;D. C. Gilmer;Stephen A Campbell;D. L. Polla

  219
  Citations

• The impact of genetic counselling about breast cancer risk on women’s risk perceptions and levels of distress

  A Cull;E D C Anderson;S Campbell;J Mackay

  218
  Citations

• Does Chemistry Really Matter in the Chemical Vapor Deposition of Titanium Dioxide? Precursor and Kinetic Effects on the Microstructure of Polycrystalline Films

  Charles J. Taylor;David C. Gilmer;Daniel G. Colombo;G. D. Wilk

  206
  Citations

• Air-stable full-visible-spectrum emission from silicon nanocrystals synthesized by an all-gas-phase plasma approach.

  X D Pi;R W Liptak;J Deneen Nowak;N P Wells

  192
  Citations

• Anhydrous Metal Nitrates as Volatile Single Source Precursors for the CVD of Metal Oxide Films

  Daniel G. Colombo;David C. Gilmer;Victor G. Young;Stephen A. Campbell

  187
  Citations

• Structural and electrical characterization of TiO2 grown from titanium tetrakis‐isopropoxide (TTIP) and TTIP/H2O ambients

  J. Yan;D. C. Gilmer;Stephen A Campbell;Wayne L Gladfelter

  175
  Citations

• Reduction of titanium and other metal oxides using electrodeoxidation

  Unknown

  162
  Citations

• Method and apparatus for reducing reactant crossover in a liquid feed electrochemical fuel cell

  David P. Wilkinson;Mark C. Johnson;Kevin M. Colbow;Stephen A. Campbell

  161
  Citations

• Approaching nanoxerography: The use of electrostatic forces to position nanoparticles with 100 nm scale resolution

  Heiko O. Jacobs;Stephen A. Campbell;Michael G. Steward

  155
  Citations

• Room-temperature atmospheric oxidation of Si nanocrystals after HF etching

  X. D. Pi;L. Mangolini;S. A. Campbell;U. Kortshagen

  151
  Citations

• Plasma synthesis of single-crystal silicon nanoparticles for novel electronic device applications

  Ameya Bapat;Curtis Anderson;Christopher R. Perrey;C. Barry Carter

  150
  Citations

• A study of mixtures of HfO2 and TiO2 as high-k gate dielectrics

  Unknown

  135
  Citations

• Task-oriented sensing, computation, and communication integration for multi-device edge AI

  Unknown

  131
  Citations

• Revealing the Origins of 3D Anisotropic Thermal Conductivities of Black Phosphorus

  Jie Zhu;Jie Zhu;Haechan Park;Jun‐Yang Chen;Xiaokun Gu

  129
  Citations

• Post-synthetic modification of covalent organic frameworks for CO2 electroreduction

  Unknown

  117
  Citations