Peter Vettiger

Research.com Recognitions

• 2001 - IEEE Fellow For contributions to the development of microfabrication processes.

Overview

Best Publications

• Translating biomolecular recognition into nanomechanics.

  J. Fritz;M. K. Baller;M. K. Baller;H. P. Lang;H. P. Lang;H. Rothuizen

  2324
  Citations

• SU-8: a low-cost negative resist for MEMS

  Hubert Lorenz;M. Despont;N. Fahrni;N. LaBianca

  1380
  Citations

• The "millipede" - nanotechnology entering data storage

  P. Vettiger;G. Cross;M. Despont;U. Drechsler

  1016
  Citations

• The Millipede: more than one thousand tips for future AFM data storage

  P. Vettiger;M. Despont;U. Drechsler;U. Dürig

  917
  Citations

• High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS

  Hubert Lorenz;M. Despont;N. Fahrni;J. Brugger

  775
  Citations

• A cantilever array-based artificial nose

  M.K Baller;M.K Baller;H.P Lang;H.P Lang;J Fritz;J Fritz;Ch Gerber

  517
  Citations

• "Millipede": a MEMS-based scanning-probe data-storage system

  E. Eleftheriou;T. Antonakopoulos;G.K. Binnig;G. Cherubini

  377
  Citations

• Ultrahigh-density atomic force microscopy data storage with erase capability

  G. Binnig;M. Despont;U. Drechsler;W. Häberle

  377
  Citations

• A CHEMICAL SENSOR BASED ON A MICROMECHANICAL CANTILEVER ARRAY FOR THE IDENTIFICATION OF GASES AND VAPORS

  H P Lang;R Berger;F Battiston;J P Ramseyer

  300
  Citations

• Atomic force microscope cantilevers for combined thermomechanical data writing and reading

  William Paul King;Thomas W. Kenny;Kenneth E. Goodson;Graham Cross

  251
  Citations

• Ion-beam patterning of magnetic films using stencil masks

  B. D. Terris;L. Folks;D. Weller;J. E. E. Baglin

  251
  Citations

• High-aspect-ratio, ultrathick, negative-tone near-uv photoresist for MEMS applications

  M. Despont;H. Lorenz;N. Fahrni;J. Brugger

  251
  Citations

• Ultrahigh density, high-data-rate NEMS-based AFM data storage system

  P. Vettiger;J. Brugger;M. Despont;U. Drechsler

  243
  Citations

• Sequential position readout from arrays of micromechanical cantilever sensors

  H. P. Lang;R. Berger;C. Andreoli;J. Brugger

  228
  Citations

• Fabrication of photoplastic high-aspect ratio microparts and micromolds using SU-8 UV resist

  Hubert Lorenz;M. Despont;P. Vettiger;Philippe Renaud

  216
  Citations

• VLSI-NEMS chip for parallel AFM data storage

  M. Despont;J. Brugger;U. Drechsler;U. Dürig

  210
  Citations

• Temperature dependence of the force sensitivity of silicon cantilevers

  U. Gysin;S. Rast;P. Ruff;E. Meyer

  206
  Citations

• Fabrication process of high aspect ratio elastic and SU-8 structures for piezoelectric motor applications

  L. Dellmann;S. Roth;C. Beuret;G. A. Racine

  191
  Citations

• Mass-storage applications of local probe arrays

  Gerd Karl Binnig;Heinrich Rohrer;Peter Vettiger

  183
  Citations

• 5×5 2D AFM cantilever arrays a first step towards a Terabit storage device

  M. Lutwyche;C. Andreoli;G. Binnig;J. Brugger

  177
  Citations