Stephanus Büttgenbach

Overview

Best Publications

• Fabrication and investigation of in-plane compliant SU8 structures for MEMS and their application to micro valves and micro grippers

  Volker Seidemann;Sebastian Bütefisch;Stephanus Büttgenbach

  200
  Citations

• Novel micro-pneumatic actuator for MEMS

  Sebastian Bütefisch;Volker Seidemann;Stephanus Büttgenbach

  141
  Citations

• SU8-micromechanical structures with in situ fabricated movable parts

  V. Seidemann;J. Rabe;M. Feldmann;S. Büttgenbach

  139
  Citations

• Monolithic miniaturized quartz microbalance array and its application to chemical sensor systems for liquids

  J. Rabe;S. Buttgenbach;J. Schroder;P. Hauptmann

  124
  Citations

• Simulation of anisotropic chemical etching of crystalline silicon using a cellular automata model

  O. Than;S. Büttgenbach

  122
  Citations

• Multiple internal reflection poly(dimethylsiloxane) systems for optical sensing

  A. Llobera;S. Demming;R. Wilke;S. Büttgenbach

  119
  Citations

• Poly(dimethylsiloxane) hollow Abbe prism with microlenses for detection based on absorption and refractive index shift.

  A Llobera;R Wilke;S Büttgenbach

  111
  Citations

• SU-8 Optical Accelerometers

  A. Llobera;V. Seidemann;J.A. Plaza;V.J. Cadarso

  111
  Citations

• Electrical characterisation of high-frequency thickness-shear-mode resonators by impedance analysis

  Bernd Zimmermann;Ralf Lucklum;Peter Hauptmann;Jens Rabe

  108
  Citations

• Nanoindentation testing of SU-8 photoresist mechanical properties

  A. T. Al-Halhouli;I. Kampen;T. Krah;S. Büttgenbach

  93
  Citations

• Recent developments in dimensional metrology for microsystem components

  S. Cao;U. Brand;T. Kleine-Besten;W. Hoffmann

  77
  Citations

• High-pressure microfluidic systems (HPMS): flow and cavitation measurements in supported silicon microsystems

  Thomas Gothsch;Christiane Schilcher;Claudia Richter;Stefan Beinert

  76
  Citations

• Development of a novel electromagnetic pump for biomedical applications

  A.T. Al-Halhouli;M.I. Kilani;M.I. Kilani;S. Büttgenbach

  73
  Citations

• A micromachined capillary electrophoresis chip with fully integrated electrodes for separation and electrochemical detection

  Ralph Wilke;Stephanus Büttgenbach

  71
  Citations

• Miniaturized QCM-based flow system for immunosensor application in liquid

  Monika Michalzik;Ralph Wilke;Stephanus Büttgenbach

  71
  Citations

• High frequency glow discharges at atmospheric pressure with micro-structured electrode arrays

  L. Baars-Hibbe;P. Sichler;C. Schrader;N. Lucas

  71
  Citations

• Hybrid electronic tongue based on optical and electrochemical microsensors for quality control of wine

  Manuel Gutiérrez;Andreu Llobera;Jordi Vila-Planas;Fina Capdevila

  71
  Citations

• Microcoils and microrelays — an optimized multilayer fabrication process

  Markus Ohnmacht;Volker Seidemann;Stephanus Büttgenbach

  70
  Citations

• Effect of Microchannel Geometry on High‐Pressure Dispersion and Emulsification

  T. Gothsch;J. H. Finke;S. Beinert;C. Lesche

  69
  Citations

• Separate determination of liquid density and viscosity with sagittally corrugated Love-mode sensors

  F. Herrmann;D. Hahn;S. Büttgenbach

  68
  Citations

• Micromechanical three-axial tactile force sensor for micromaterial characterisation

  S. Bütefisch;S. Büttgenbach;T. Kleine-Besten;U. Brand

  67
  Citations