Richard S. Muller

What is he best known for?

The fields of study he is best known for:

• Optics
• Electrical engineering
• Semiconductor

Richard S. Muller mainly investigates Silicon, Optoelectronics, Surface micromachining, Electrical engineering and Composite material. His Silicon research is multidisciplinary, incorporating perspectives in Chemical vapor deposition, Nanotechnology, Polycrystalline silicon and Integrated circuit. His study in the field of Silicon nitride and Substrate also crosses realms of Tetrafluoromethane.

His studies in Optoelectronics integrate themes in fields like Transistor, Microstructure and Electronic circuit. The various areas that Richard S. Muller examines in his Transistor study include Voltage reference, Semiconductor and Electronics. His work carried out in the field of Composite material brings together such families of science as Thin film and Wafer.

His most cited work include:

• Etch rates for micromachining processing (712 citations)
• Device Electronics for Integrated Circuits (660 citations)
• Surface micromachining for microelectromechanical systems (529 citations)

What are the main themes of his work throughout his whole career to date?

His primary scientific interests are in Optoelectronics, Silicon, Optics, Electrical engineering and Microelectromechanical systems. His Optoelectronics study integrates concerns from other disciplines, such as Piezoelectricity and Transistor, Voltage. His research in Silicon intersects with topics in Electronic engineering, Composite material, Chemical vapor deposition and Polycrystalline silicon.

The concepts of his Composite material study are interwoven with issues in Thin film, Structural engineering and Wafer. His work on Laser, Scanner and Beam is typically connected to Surface micromachining as part of general Optics study, connecting several disciplines of science. His Microelectromechanical systems research is multidisciplinary, relying on both Adaptive optics and Interferometry.

He most often published in these fields:

• Optoelectronics (45.90%)
• Silicon (26.89%)
• Optics (20.98%)

What were the highlights of his more recent work (between 2001-2021)?

• Microelectromechanical systems (16.39%)
• Optoelectronics (45.90%)
• Silicon photonics (5.57%)

In recent papers he was focusing on the following fields of study:

Richard S. Muller spends much of his time researching Microelectromechanical systems, Optoelectronics, Silicon photonics, Optics and Actuator. The study incorporates disciplines such as Silicon, Electrical engineering, Voltage, Interferometry and Electronic engineering in addition to Microelectromechanical systems. His biological study deals with issues like Structural engineering, which deal with fields such as Layer.

His Optoelectronics research focuses on Capacitance and how it relates to Cantilever. His Optics study incorporates themes from Coupling and Base. His biological study spans a wide range of topics, including Nanotechnology, Photolithography and Adaptive optics.

Between 2001 and 2021, his most popular works were:

• Large-scale broadband digital silicon photonic switches with vertical adiabatic couplers (161 citations)
• Electrostatic charge and field sensors based on micromechanical resonators (124 citations)
• Optical system applicable to improving the dynamic range of shack-hartmann sensors (107 citations)

In his most recent research, the most cited papers focused on:

• Optics
• Electrical engineering
• Semiconductor

Richard S. Muller focuses on Microelectromechanical systems, Optoelectronics, Actuator, Silicon and Silicon photonics. The Microelectromechanical systems study combines topics in areas such as Electronic engineering and Electrical engineering, Voltage. His specific area of interest is Optoelectronics, where Richard S. Muller studies CMOS.

His Actuator research incorporates themes from Substrate, Nanotechnology, Adaptive optics and Interferometry. Silicon is closely attributed to Photonics in his work. The concepts of his Silicon photonics study are interwoven with issues in Hybrid silicon laser and Optical switch.