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Henry Baltes

Henry Baltes

D-Index & Metrics

Electronics and Electrical Engineering

D-Index
62
Citations
12044
World Ranking
1483
National Ranking
37

Research.com Recognitions

  • 2003 - IEEE Fellow For contributions to the development and commercialization of CMOS based MEMS.

Overview

Henry Baltes is affiliated with ETH Zurich in Switzerland and has contributed to the field of microelectromechanical systems (MEMS). Their work focuses on the development and commercialization of CMOS-based MEMS technologies.

Baltes has been recognized as an IEEE Fellow in 2003 for their contributions in this area. This distinction reflects their involvement in advancing MEMS through integration with complementary metal-oxide-semiconductor (CMOS) processes.

This scientist's career is situated in the technological domain of semiconductor and microsystem engineering, with an emphasis on practical applications that intersect microfabrication and electronics. The affiliation with ETH Zurich situates them within a leading research institution known for engineering and technology.

Best Publications

  • Integrated semiconductor magnetic field sensors

    H.P. Baltes;R.S. Popovic

  • Complementary metal oxide semiconductor cantilever arrays on a single chip: mass-sensitive detection of volatile organic compounds.

    Dirk Lange;Christoph Hagleitner;Andreas Hierlemann;Oliver Brand

  • Micromachined thermally based CMOS microsensors

    H. Baltes;O. Paul;O. Brand

  • Microfabrication techniques for chemical/biosensors

    A. Hierlemann;O. Brand;C. Hagleitner;H. Baltes

  • Silicon dioxide sacrificial layer etching in surface micromachining

    J. Bühler;F.-P. Steiner;H. Baltes

  • Process-dependent thin-film thermal conductivities for thermal CMOS MEMS

    M. von Arx;O. Paul;H. Baltes

  • CMOS microelectrode array for the monitoring of electrogenic cells.

    F Heer;W Franks;A Blau;S Taschini

  • CMOS Schmitt trigger design

    I.M. Filanovsky;H. Baltes

  • CMOS single-chip gas detection system comprising capacitive, calorimetric and mass-sensitive microsensors

    C. Hagleitner;D. Lange;A. Hierlemann;O. Brand

  • CMOS as sensor technology

    Henry Baltes

  • Application-specific sensor systems based on CMOS chemical microsensors

    Andreas Hierlemann;D. Lange;C. Hagleitner;N. Kerness

  • CMOS-based chemical microsensors

    Andreas Hierlemann;Henry Baltes

  • CMOS integrated ciliary actuator array as a general-purpose micromanipulation tool for small objects

    J.W. Suh;R.B. Darling;K.-F. Bohringer;B.R. Donald

  • Light-emitting devices in industrial CMOS technology

    J. Kramer;P. Seitz;E.F. Steigmeier;H. Auderset

  • Mechanical properties of thin films from the load deflection of long clamped plates

    V. Ziebart;O. Paul;U. Munch;J. Schwizer

  • Two-dimensional magnetic microsensor with on-chip signal processing for contactless angle measurement

    A. Haberli;M. Schneider;P. Malcovati;R. Castagnetti

  • Resonant Magnetic Field Sensor With Frequency Output

    R. Sunier;T. Vancura;Yue Li;K.-U. Kirstein

  • Tuning sensitivity and selectivity of complementary metal oxide semiconductor-based capacitive chemical microsensors.

    Adrian M. Kummer;and Andreas Hierlemann;Henry Baltes

  • Silicon gas flow sensors using industrial CMOS and bipolar IC technology

    D. Moser;R. Lenggenhager;H. Baltes

  • A new approach for the fabrication of micromechanical structures

    Unknown

  • Offset reduction in Hall devices by continuous spinning current method

    R. Steiner;Ch. Maier;A. Hàberli;F.-P. Steiner

  • Temperature calibration of CMOS magnetic vector probe for contactless angle measurement system

    M. Schneider;A. Haberli;M. Metz;P. Malcovati

Frequent Co-Authors

Oliver Brand
Oliver Brand Georgia Institute of Technology
Oliver Paul
Oliver Paul University of Freiburg
Christoph Hagleitner
Christoph Hagleitner IBM (United States)
Piero Malcovati
Piero Malcovati University of Pavia
Franco Maloberti
Franco Maloberti University of Pavia
Qiuting Huang
Qiuting Huang ETH Zurich
N. F. de Rooij
N. F. de Rooij École Polytechnique Fédérale de Lausanne
Arokia Nathan
Arokia Nathan University of Cambridge
Pasqualina M. Sarro
Pasqualina M. Sarro Delft University of Technology

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