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SPIE

SPIE Photomask Technology and the International Conference on Extreme Ultraviolet Lithography (PT)

Location: Monterey , United States

Submission deadline: 5/4/2022

Conference dates: 9/25/2022 - 9/29/2022

Research H-index
5

Ranking & Metrics

Discipline name Position Best Scientists Publications D-Index
Materials Science 92 9 14 3

Call for Papers

Papers addressing aspects of photomask research,
development, manufacturing, and use are all solicited, including:
• Design automation and data prep (DFM, OPC,
SMO)
• Curvilinear masks and inverse lithography
technology
• Mask writing, corrections, process
compensation
• Mask blanks, defects, and metrology
• E-beam and optical resists
• Mask patterning process (resist, develop, etch)
• Metrology (CD, placement, AFM, AIMS)

Papers that address all aspects of EUV lithography
are solicited. There is interest in reviewing technologies that are close to manufacturing, but also for
papers that address new and exploratory concepts
in EUV.
• EUV readiness and insertion in manufacturing
• EUV tools, including sources and optics
• EUV mask metrology, inspection, and lifetime
• EUV mask and imaging
• EUV mask pellicles and alternative absorbers

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