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Stephen D. Senturia

Stephen D. Senturia

D-Index & Metrics

Discipline name D-Index World Ranking National Ranking Publications Citations
Materials Science 60 7052 1766 161 12921
Engineering and Technology 67 1336 436 190 14723

Stephen D. Senturia publications per year

The chart shows the history of publications by Stephen D. Senturia between 1958 and 2008, highlighting the no. of papers published in each year and offering an overview of the publication velocity of this scholar. Stephen D. Senturia published across 51 years, from 1958 to 2008, averaging 4.1 papers a year. Output peaked at 16 publications in 1990. 1 of the 209 publications appeared in the last two years.

No. of publications
5 10 15
Bar chart. Horizontal axis: year, 1958 to 2008. Vertical axis: number of publications, 0 to 16. Peak 16 publications in 1990. 1958: 1 publication 1959: 0 publications 1960: 0 publications 1961: 0 publications 1962: 0 publications 1963: 0 publications 1964: 0 publications 1965: 0 publications 1966: 1 publication 1967: 0 publications 1968: 0 publications 1969: 1 publication 1970: 5 publications 1971: 1 publication 1972: 0 publications 1973: 4 publications 1974: 0 publications 1975: 0 publications 1976: 2 publications 1977: 2 publications 1978: 2 publications 1979: 4 publications 1980: 3 publications 1981: 11 publications 1982: 4 publications 1983: 8 publications 1984: 5 publications 1985: 7 publications 1986: 8 publications 1987: 8 publications 1988: 12 publications 1989: 10 publications 1990: 16 publications 1991: 6 publications 1992: 12 publications 1993: 6 publications 1994: 4 publications 1995: 6 publications 1996: 7 publications 1997: 15 publications 1998: 4 publications 1999: 4 publications 2000: 7 publications 2001: 6 publications 2002: 4 publications 2003: 5 publications 2004: 5 publications 2005: 2 publications 2006: 0 publications 2007: 0 publications 2008: 1 publication
1958 2008

209 publications in total across all disciplines

View publications per year as a table
Stephen D. Senturia: publications per year, 1958 to 2008
Year Publications
1958 1
1959 0
1960 0
1961 0
1962 0
1963 0
1964 0
1965 0
1966 1
1967 0
1968 0
1969 1
1970 5
1971 1
1972 0
1973 4
1974 0
1975 0
1976 2
1977 2
1978 2
1979 4
1980 3
1981 11
1982 4
1983 8
1984 5
1985 7
1986 8
1987 8
1988 12
1989 10
1990 16
1991 6
1992 12
1993 6
1994 4
1995 6
1996 7
1997 15
1998 4
1999 4
2000 7
2001 6
2002 4
2003 5
2004 5
2005 2
2006 0
2007 0
2008 1
Total 209
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Stephen D. Senturia publication distribution in Engineering and Technology in 2026

The chart shows the distribution of publications by all Research.com ranked scientists in the field of Engineering and Technology in 2026. The highlighted bar marks where Stephen D. Senturia sits on this spectrum.

No. of scientists
100 200 300 400
Bar chart with 78 bars. Horizontal axis: publications, 38–47 to 804+. Vertical axis: number of scientists, 0 to 457. Most scientists, 457, have 148–157 publications. The last bar groups every scientist with 804 publications or more. The highlighted bar, 188–197 publications, is where this scientist sits. 38–47 publications: 20 scientists 48–57 publications: 35 scientists 58–67 publications: 96 scientists 68–77 publications: 135 scientists 78–87 publications: 190 scientists 88–97 publications: 259 scientists 98–107 publications: 283 scientists 108–117 publications: 369 scientists 118–127 publications: 341 scientists 128–137 publications: 386 scientists 138–147 publications: 372 scientists 148–157 publications: 457 scientists 158–167 publications: 415 scientists 168–177 publications: 407 scientists 178–187 publications: 421 scientists 188–197 publications: 378 scientists 198–207 publications: 403 scientists 208–217 publications: 317 scientists 218–227 publications: 346 scientists 228–237 publications: 321 scientists 238–247 publications: 260 scientists 248–257 publications: 280 scientists 258–267 publications: 240 scientists 268–277 publications: 214 scientists 278–287 publications: 242 scientists 288–297 publications: 203 scientists 298–307 publications: 166 scientists 308–317 publications: 154 scientists 318–327 publications: 175 scientists 328–337 publications: 159 scientists 338–347 publications: 99 scientists 348–357 publications: 131 scientists 358–367 publications: 106 scientists 368–377 publications: 118 scientists 378–387 publications: 97 scientists 388–397 publications: 108 scientists 398–407 publications: 82 scientists 408–417 publications: 71 scientists 418–427 publications: 64 scientists 428–437 publications: 55 scientists 438–447 publications: 54 scientists 448–457 publications: 60 scientists 458–467 publications: 47 scientists 468–477 publications: 40 scientists 478–487 publications: 30 scientists 488–497 publications: 29 scientists 498–507 publications: 38 scientists 508–517 publications: 40 scientists 518–527 publications: 32 scientists 528–537 publications: 23 scientists 538–547 publications: 28 scientists 548–557 publications: 23 scientists 558–567 publications: 19 scientists 568–577 publications: 16 scientists 578–587 publications: 17 scientists 588–597 publications: 18 scientists 598–607 publications: 22 scientists 608–617 publications: 15 scientists 618–627 publications: 9 scientists 628–637 publications: 11 scientists 638–647 publications: 21 scientists 648–657 publications: 12 scientists 658–667 publications: 9 scientists 668–677 publications: 11 scientists 678–687 publications: 9 scientists 688–697 publications: 6 scientists 698–707 publications: 14 scientists 708–717 publications: 7 scientists 718–727 publications: 8 scientists 728–737 publications: 10 scientists 738–747 publications: 9 scientists 748–757 publications: 5 scientists 758–767 publications: 5 scientists 768–777 publications: 11 scientists 778–787 publications: 7 scientists 788–797 publications: 2 scientists 798–803 publications: 4 scientists 804+ publications: 100 scientists
38–47 publications 804+

This scientist: 190 publications — 44th percentile

44% of scientists in this discipline score the same or lower.

The last bar groups every scientist with 804 publications or more.

View publications distribution as a table
Number of Engineering and Technology scientists by publication count, Research.com 2026 ranking edition. Based on 9,796 ranked scientists.
Publications Scientists This scientist
38–47 20
48–57 35
58–67 96
68–77 135
78–87 190
88–97 259
98–107 283
108–117 369
118–127 341
128–137 386
138–147 372
148–157 457
158–167 415
168–177 407
178–187 421
188–197 378 190
198–207 403
208–217 317
218–227 346
228–237 321
238–247 260
248–257 280
258–267 240
268–277 214
278–287 242
288–297 203
298–307 166
308–317 154
318–327 175
328–337 159
338–347 99
348–357 131
358–367 106
368–377 118
378–387 97
388–397 108
398–407 82
408–417 71
418–427 64
428–437 55
438–447 54
448–457 60
458–467 47
468–477 40
478–487 30
488–497 29
498–507 38
508–517 40
518–527 32
528–537 23
538–547 28
548–557 23
558–567 19
568–577 16
578–587 17
588–597 18
598–607 22
608–617 15
618–627 9
628–637 11
638–647 21
648–657 12
658–667 9
668–677 11
678–687 9
688–697 6
698–707 14
708–717 7
718–727 8
728–737 10
738–747 9
748–757 5
758–767 5
768–777 11
778–787 7
788–797 2
798–803 4
804+ 100
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Stephen D. Senturia D-index placement in Engineering and Technology in 2026

The chart shows the D-index (discipline H-index) distribution of Engineering and Technology scientists ranked by Research.com in 2026. The highlighted bar marks where Stephen D. Senturia sits on this spectrum.

No. of scientists
100 200 300 400
Bar chart with 78 bars. Horizontal axis: D-Index, 30 to 107+. Vertical axis: number of scientists, 0 to 426. Most scientists, 426, have 42 D-Index. The last bar groups every scientist with 107 D-Index or more. The highlighted bar, 67 D-Index, is where this scientist sits. 30 D-Index: 59 scientists 31 D-Index: 114 scientists 32 D-Index: 129 scientists 33 D-Index: 189 scientists 34 D-Index: 200 scientists 35 D-Index: 262 scientists 36 D-Index: 311 scientists 37 D-Index: 312 scientists 38 D-Index: 350 scientists 39 D-Index: 385 scientists 40 D-Index: 348 scientists 41 D-Index: 362 scientists 42 D-Index: 426 scientists 43 D-Index: 380 scientists 44 D-Index: 310 scientists 45 D-Index: 341 scientists 46 D-Index: 301 scientists 47 D-Index: 306 scientists 48 D-Index: 271 scientists 49 D-Index: 246 scientists 50 D-Index: 210 scientists 51 D-Index: 253 scientists 52 D-Index: 213 scientists 53 D-Index: 221 scientists 54 D-Index: 195 scientists 55 D-Index: 186 scientists 56 D-Index: 170 scientists 57 D-Index: 167 scientists 58 D-Index: 166 scientists 59 D-Index: 144 scientists 60 D-Index: 152 scientists 61 D-Index: 141 scientists 62 D-Index: 138 scientists 63 D-Index: 131 scientists 64 D-Index: 118 scientists 65 D-Index: 114 scientists 66 D-Index: 119 scientists 67 D-Index: 95 scientists 68 D-Index: 87 scientists 69 D-Index: 77 scientists 70 D-Index: 89 scientists 71 D-Index: 69 scientists 72 D-Index: 54 scientists 73 D-Index: 46 scientists 74 D-Index: 55 scientists 75 D-Index: 54 scientists 76 D-Index: 49 scientists 77 D-Index: 53 scientists 78 D-Index: 46 scientists 79 D-Index: 28 scientists 80 D-Index: 39 scientists 81 D-Index: 36 scientists 82 D-Index: 24 scientists 83 D-Index: 26 scientists 84 D-Index: 36 scientists 85 D-Index: 18 scientists 86 D-Index: 25 scientists 87 D-Index: 19 scientists 88 D-Index: 26 scientists 89 D-Index: 27 scientists 90 D-Index: 23 scientists 91 D-Index: 15 scientists 92 D-Index: 12 scientists 93 D-Index: 9 scientists 94 D-Index: 15 scientists 95 D-Index: 10 scientists 96 D-Index: 13 scientists 97 D-Index: 13 scientists 98 D-Index: 9 scientists 99 D-Index: 7 scientists 100 D-Index: 7 scientists 101 D-Index: 8 scientists 102 D-Index: 7 scientists 103 D-Index: 7 scientists 104 D-Index: 9 scientists 105 D-Index: 6 scientists 106 D-Index: 9 scientists 107+ D-Index: 99 scientists
30 D-Index 107+

This scientist: 67 D-Index — 87th percentile

87% of scientists in this discipline score the same or lower.

The last bar groups every scientist with 107 D-Index or more.

View D-Index distribution as a table
Number of Engineering and Technology scientists by D-index, Research.com 2026 ranking edition. Based on 9,796 ranked scientists.
D-Index Scientists This scientist
30 59
31 114
32 129
33 189
34 200
35 262
36 311
37 312
38 350
39 385
40 348
41 362
42 426
43 380
44 310
45 341
46 301
47 306
48 271
49 246
50 210
51 253
52 213
53 221
54 195
55 186
56 170
57 167
58 166
59 144
60 152
61 141
62 138
63 131
64 118
65 114
66 119
67 95 67
68 87
69 77
70 89
71 69
72 54
73 46
74 55
75 54
76 49
77 53
78 46
79 28
80 39
81 36
82 24
83 26
84 36
85 18
86 25
87 19
88 26
89 27
90 23
91 15
92 12
93 9
94 15
95 10
96 13
97 13
98 9
99 7
100 7
101 8
102 7
103 7
104 9
105 6
106 9
107+ 99
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Research.com Recognitions

  • 2003 - Member of the National Academy of Engineering For contributions to and leadership in research on microelectromechanical systems.
  • 1993 - IEEE Fellow For contributions to the application of microfabrication technology to microsensors and microacoustors, and to the characterization of microelectronic materials

Overview

What is he best known for?

The fields of study he is best known for:

  • Electrical engineering
  • Thermodynamics
  • Mechanical engineering

His primary areas of investigation include Dielectric, Composite material, Electrical engineering, Optoelectronics and Capacitance. His Dielectric research includes elements of Transistor, Scattering, Oxide and Electrode. In most of his Composite material studies, his work intersects topics such as Thin film.

His Electrical engineering study combines topics in areas such as Electron mobility, Molecular physics and Electron density. The concepts of his Optoelectronics study are interwoven with issues in Layer, Isothermal process, Surface micromachining and Pressure sensor. His work focuses on many connections between Capacitance and other disciplines, such as Microfabrication, that overlap with his field of interest in Mechanical engineering, LOCOS, Torque, Electric motor and Miniaturization.

His most cited work include:

  • Microfabricated structures for the in situ measurement of residual stress, Young’s modulus, and ultimate strain of thin films (237 citations)
  • Dielectric Analysis of Thermoset Cure. (207 citations)
  • High-density, multi-level interconnects, flex circuits, and tape for TAB (204 citations)

What are the main themes of his work throughout his whole career to date?

Stephen D. Senturia spends much of his time researching Composite material, Optoelectronics, Thin film, Electrical engineering and Dielectric. In his study, which falls under the umbrella issue of Composite material, Etching, Doping and Substrate is strongly linked to Silicon. His Optoelectronics research is multidisciplinary, incorporating perspectives in Transistor, Electrode and Optics.

The Electrode study combines topics in areas such as Acoustics, Conductance, Deflection and Voltage. His Thin film research incorporates themes from Adhesion and Polyimide. His Dielectric research focuses on Analytical chemistry and how it relates to Moisture.

He most often published in these fields:

  • Composite material (25.36%)
  • Optoelectronics (17.39%)
  • Thin film (13.77%)

What were the highlights of his more recent work (between 1995-2008)?

  • Microelectromechanical systems (9.42%)
  • Optics (8.70%)
  • Actuator (5.07%)

In recent papers he was focusing on the following fields of study:

Stephen D. Senturia focuses on Microelectromechanical systems, Optics, Actuator, Diffraction grating and Voltage. His work carried out in the field of Microelectromechanical systems brings together such families of science as Power, Surface micromachining, Heat engine, Turbine and Electrical engineering. His work in Surface micromachining tackles topics such as Interconnection which are related to areas like Electronic engineering.

His Electrical engineering research integrates issues from Torr, Pressure measurement, Ambient pressure and Pressure sensor. His Diffraction grating study results in a more complete grasp of Optoelectronics. The study incorporates disciplines such as Control theory, Nonlinear system, Quasistatic process, Deflection and Electrode in addition to Voltage.

Between 1995 and 2008, his most popular works were:

  • MICRO-HEAT ENGINES, GAS TURBINES, AND ROCKET ENGINES -THE MIT MICROENGINE PROJECT- (167 citations)
  • Simulating the behavior of MEMS devices: computational methods and needs (148 citations)
  • Power MEMS and microengines (143 citations)

In his most recent research, the most cited papers focused on:

  • Electrical engineering
  • Thermodynamics
  • Semiconductor

The scientist’s investigation covers issues in Microelectromechanical systems, Actuator, Surface micromachining, Structural engineering and Turbine. Microelectromechanical systems is a subfield of Optoelectronics that Stephen D. Senturia studies. Stephen D. Senturia has included themes like Acoustics, Cad system, Deflection and Electrode in his Actuator study.

His biological study spans a wide range of topics, including Nanotechnology, Electrical engineering and Systems engineering. Stephen D. Senturia has researched Structural engineering in several fields, including Etching, Capacitive sensing and Composite material, Microstructure. Stephen D. Senturia interconnects Generator, Power and Heat engine in the investigation of issues within Turbine.

Best Publications

  • Effect of surface roughness on the response of thickness-shear mode resonators in liquids

    Stephen J. Martin;Gregory C. Frye;Antonio J. Ricco;Stephen D. Senturia

  • Microfabricated structures for the in situ measurement of residual stress, Young’s modulus, and ultimate strain of thin films

    Mark G. Allen;Mehran Mehregany;Roger T. Howe;Stephen D. Senturia

  • MICRO-HEAT ENGINES, GAS TURBINES, AND ROCKET ENGINES -THE MIT MICROENGINE PROJECT-

    A. H. Epstein;S. D. Senturia;O. Al-Midani;G. Anathasuresh

  • Dielectric Analysis of Thermoset Cure.

    Stephen D. Senturia;Norman F. Sheppard

  • Power MEMS and microengines

    A.H. Epstein;S.D. Senturia;G. Anathasuresh;A. Ayon

  • High-density, multi-level interconnects, flex circuits, and tape for TAB

    David Volfson;Stephen D. Senturia

  • A computer-aided design system for microelectromechanical systems (MEMCAD)

    S.D. Senturia;R.M. Harris;B.P. Johnson;S. Kim

  • Design and calibration of a microfabricated floating-element shear-stress sensor

    M.A. Schmidt;R.T. Howe;S.D. Senturia;J.H. Haritonidis

  • Simulating the behavior of MEMS devices: computational methods and needs

    S.D. Senturia;N. Azuru;J. White

  • Operation of microfabricated harmonic and ordinary side-drive motors

    M. Megregany;P. Nagarkar;S.D. Senturia;J.H. Lang

  • Electrical conductivity in disordered systems

    David Adler;Laurence P. Flora;Stephen D. Senturia

  • Moisture diffusion in poltimide films in integrated circuits

    D. D. Denton;D. R. Day;D. F. Priore;S. D. Senturia

  • Pull-in time dynamics as a measure of absolute pressure

    R.K. Gupta;S.D. Senturia

  • A study of three microfabricated variable-capacitance motors

    Mehran Mehregany;S. F. Bart;L. S. Tavrow;J. H. Lang

  • Self-consistent simulation and modelling of electrostatically deformed diaphragms

    P. Osterberg;H. Yie;X. Cai;J. White

  • Method for fabricating side drive electrostatic micromotor

    Roger T. Howe;Jeffrey H. Lang;Martin F. Schlecht;Martin A. Schmidt

  • Novel microstructures for the in situ measurement of mechanical properties of thin films

    Mehran Mehregany;Roger T. Howe;Stephen D. Senturia

  • Electric micromotor dynamics

    S.F. Bart;M. Mehregany;L.S. Tavrow;J.H. Lang

  • Analysis of Critical Debonding Pressures of Stressed Thin Films in the Blister Test

    Mark G. Allen;Stephen D. Senturia

  • In-Situ Measurement of the Properties of Curing Systems with Microdielectrometry.

    S D Senturia;N F Sheppard;H L Lee;David R Day

  • Fast capacitance extraction of general three-dimensional structures

    K. Nabors;S. Kim;J. White;S. Senturia

  • Power MEMS and Microengines

    Alan H. Epstein;Stephen D. Senturia;G. K. Ananthasuresh;Arturo A. Ayon

Frequent Co-Authors

Mehran Mehregany
Mehran Mehregany Case Western Reserve University
Roger T. Howe
Roger T. Howe Stanford University
Mark G. Allen
Mark G. Allen University of Pennsylvania
Yao-Joe Yang
Yao-Joe Yang National Taiwan University
G. K. Ananthasuresh
G. K. Ananthasuresh Indian Institute of Science
Reza Ghodssi
Reza Ghodssi University of Maryland, College Park

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