Stephen D. Senturia

What is he best known for?

The fields of study he is best known for:

• Electrical engineering
• Thermodynamics
• Mechanical engineering

His primary areas of investigation include Dielectric, Composite material, Electrical engineering, Optoelectronics and Capacitance. His Dielectric research includes elements of Transistor, Scattering, Oxide and Electrode. In most of his Composite material studies, his work intersects topics such as Thin film.

His Electrical engineering study combines topics in areas such as Electron mobility, Molecular physics and Electron density. The concepts of his Optoelectronics study are interwoven with issues in Layer, Isothermal process, Surface micromachining and Pressure sensor. His work focuses on many connections between Capacitance and other disciplines, such as Microfabrication, that overlap with his field of interest in Mechanical engineering, LOCOS, Torque, Electric motor and Miniaturization.

His most cited work include:

• Microfabricated structures for the in situ measurement of residual stress, Young’s modulus, and ultimate strain of thin films (237 citations)
• Dielectric Analysis of Thermoset Cure. (207 citations)
• High-density, multi-level interconnects, flex circuits, and tape for TAB (204 citations)

What are the main themes of his work throughout his whole career to date?

Stephen D. Senturia spends much of his time researching Composite material, Optoelectronics, Thin film, Electrical engineering and Dielectric. In his study, which falls under the umbrella issue of Composite material, Etching, Doping and Substrate is strongly linked to Silicon. His Optoelectronics research is multidisciplinary, incorporating perspectives in Transistor, Electrode and Optics.

The Electrode study combines topics in areas such as Acoustics, Conductance, Deflection and Voltage. His Thin film research incorporates themes from Adhesion and Polyimide. His Dielectric research focuses on Analytical chemistry and how it relates to Moisture.

He most often published in these fields:

• Composite material (25.36%)
• Optoelectronics (17.39%)
• Thin film (13.77%)

What were the highlights of his more recent work (between 1995-2008)?

• Microelectromechanical systems (9.42%)
• Optics (8.70%)
• Actuator (5.07%)

In recent papers he was focusing on the following fields of study:

Stephen D. Senturia focuses on Microelectromechanical systems, Optics, Actuator, Diffraction grating and Voltage. His work carried out in the field of Microelectromechanical systems brings together such families of science as Power, Surface micromachining, Heat engine, Turbine and Electrical engineering. His work in Surface micromachining tackles topics such as Interconnection which are related to areas like Electronic engineering.

His Electrical engineering research integrates issues from Torr, Pressure measurement, Ambient pressure and Pressure sensor. His Diffraction grating study results in a more complete grasp of Optoelectronics. The study incorporates disciplines such as Control theory, Nonlinear system, Quasistatic process, Deflection and Electrode in addition to Voltage.

Between 1995 and 2008, his most popular works were:

• MICRO-HEAT ENGINES, GAS TURBINES, AND ROCKET ENGINES -THE MIT MICROENGINE PROJECT- (167 citations)
• Simulating the behavior of MEMS devices: computational methods and needs (148 citations)
• Power MEMS and microengines (143 citations)

In his most recent research, the most cited papers focused on:

• Electrical engineering
• Thermodynamics
• Semiconductor

The scientist’s investigation covers issues in Microelectromechanical systems, Actuator, Surface micromachining, Structural engineering and Turbine. Microelectromechanical systems is a subfield of Optoelectronics that Stephen D. Senturia studies. Stephen D. Senturia has included themes like Acoustics, Cad system, Deflection and Electrode in his Actuator study.

His biological study spans a wide range of topics, including Nanotechnology, Electrical engineering and Systems engineering. Stephen D. Senturia has researched Structural engineering in several fields, including Etching, Capacitive sensing and Composite material, Microstructure. Stephen D. Senturia interconnects Generator, Power and Heat engine in the investigation of issues within Turbine.