Mehran Mehregany

Best Publications

• Silicon carbide MEMS for harsh environments

  M. Mehregany;C.A. Zorman;N. Rajan;Chien Hung Wu

  595
  Citations

• Monocrystalline silicon carbide nanoelectromechanical systems

  Y. T. Yang;K. L. Ekinci;X. M H Huang;L. M. Schiavone

  413
  Citations

• SiC MEMS: Opportunities and challenges for applications in harsh environments

  Mehran Mehregany;Christian A Zorman

  400
  Citations

• Microfabricated structures for the in situ measurement of residual stress, Young’s modulus, and ultimate strain of thin films

  Mark G. Allen;Mehran Mehregany;Roger T. Howe;Stephen D. Senturia

  360
  Citations

• Analysis of tip deflection and force of a bimetallic cantilever microactuator

  Wen Hwa Chu;Mehran Mehregany;Robert L. Mullen

  354
  Citations

• Microfabricated electrohydrodynamic pumps

  Stephen F. Bart;Lee S. Tavrow;Mehran Mehregany;Jefrey H. Lang

  326
  Citations

• Contact physics of gold microcontacts for MEMS switches

  Unknown

  299
  Citations

• Epitaxial growth of 3C–SiC films on 4 in. diam (100) silicon wafers by atmospheric pressure chemical vapor deposition

  Christian A. Zorman;Aaron Judah Fleischman;Andrew S. Dewa;Mehran Mehregany

  298
  Citations

• Thin-film processing of TiNi shape memory alloy

  J. A. Walker;K. J. Gabriel;Mehran Mehregany

  281
  Citations

• Electromechanical computing at 500°C with silicon carbide

  Te Hao Lee;Swarup Bhunia;Mehran Mehregany

  264
  Citations

• Contact physics of gold microcontacts for MEMS switches

  Unknown

  229
  Citations

• A SiC MEMS Resonant Strain Sensor for Harsh Environment Applications

  R.G. Azevedo;D.G. Jones;A.V. Jog;B. Jamshidi

  228
  Citations

• In situ friction and wear measurements in integrated polysilicon mechanisms

  K. J. Gabriel;K. J. Gabriel;F. Behi;F. Behi;R. Mahadevan;R. Mahadevan;Mehran Mehregany;Mehran Mehregany

  222
  Citations

• Integrated fabrication of polysilicon mechanisms

  Unknown

  217
  Citations

• Low Voltage Nanoelectromechanical Switches Based on Silicon Carbide Nanowires

  X. L. Feng;M. H. Matheny;C. A. Zorman;M. Mehregany

  203
  Citations

• Personal Navigation via High-Resolution Gait-Corrected Inertial Measurement Units

  Özkan Bebek;Michael A Suster;Srihari Rajgopal;Michael J Fu

  199
  Citations

• Extreme temperature 6H-SiC JFET integrated circuit technology

  Philip G. Neudeck;Steven L. Garverick;David J. Spry;Liang Yu Chen

  191
  Citations

• Fabrication and testing of bulk micromachined silicon carbide piezoresistive pressure sensors for high temperature applications

  Chien-Hung Wu;C.A. Zorman;M. Mehregany

  191
  Citations

• Silicon carbide for microelectromechanical systems

  M. Mehregany;C.A. Zorman;S. Roy;A.J. Fleischman

  189
  Citations

• Mechanical properties of 3C silicon carbide

  Lijun Tong;Mehran Mehregany;Lawrence G. Matus

  185
  Citations