2017 - IEEE Robert N. Noyce Medal “For contributions to lithography and nanopatterning through experimental advances in short-wavelength exposure systems and attenuated phase-shift masks.”
2013 - Fellow, National Academy of Inventors
2008 - Fellow of the American Academy of Arts and Sciences
1989 - Member of the National Academy of Engineering For contributions to submicron-structure technology and research and for leadership in teaching and promoting submicron structures.
1987 - IEEE Fellow For contributions to submicron-structures technology.
Henry I. Smith mainly investigates Optics, Optoelectronics, Lithography, Nanotechnology and Etching. His study in Diffraction, Optical filter, Grating, Diffraction grating and Interferometry is carried out as part of his Optics studies. His Grating research focuses on Crystallography and how it connects with Composite material and Substrate.
The Optoelectronics study combines topics in areas such as X-ray lithography and Electron-beam lithography. His Lithography study integrates concerns from other disciplines, such as Nanolithography, Resist, Photoresist, Photolithography and Next-generation lithography. His research integrates issues of Copolymer and Microwave in his study of Nanotechnology.
His primary areas of investigation include Optics, Lithography, Optoelectronics, X-ray lithography and Nanotechnology. His Optics research incorporates themes from Resist and Electron-beam lithography. His work in Lithography covers topics such as Next-generation lithography which are related to areas like Stencil lithography.
As part of his studies on Optoelectronics, he often connects relevant subjects like Etching. His research in Nanotechnology is mostly concerned with Nanostructure. His Silicon research includes themes of Crystallography, Composite material and Substrate.
His scientific interests lie mostly in Optics, Optoelectronics, Resonator, Lithography and Photonics. He combines subjects such as Photoresist and Modulation with his study of Optics. In general Optoelectronics study, his work on Silicon, Silicon nitride, Dielectric and Integrated optics often relates to the realm of Microphotonics, thereby connecting several areas of interest.
His Resonator research incorporates themes from Refractive index, Channel spacing, Thermal and Optical filter. His research in Lithography intersects with topics in Nanotechnology, Resist, X-ray lithography, Electron-beam lithography and Interference lithography. His Photonics study combines topics in areas such as Efficient energy use, Bandwidth and Photonic crystal.
Henry I. Smith focuses on Optics, Resonator, Optoelectronics, Lithography and Nanotechnology. His research on Optics frequently connects to adjacent areas such as Photoresist. Henry I. Smith has included themes like Multiplexer, Optical cavity, Bandwidth and Optical filter in his Resonator study.
His work on Silicon, Integrated circuit and Silicon nitride as part of general Optoelectronics study is frequently linked to Microphotonics and Folding, therefore connecting diverse disciplines of science. His Lithography research includes elements of Self-assembly and Copolymer, Polymer. His work carried out in the field of Nanotechnology brings together such families of science as 3d shapes and Scanning electron microscope.
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Liquid crystal device
David C Shaver;Henry I Smith;Dale C Flanders.
Photonic-bandgap microcavities in optical waveguides
J. S. Foresi;P. R. Villeneuve;J. Ferrera;E. R. Thoen.
Templated Self‐Assembly of Block Copolymers: Top‐Down Helps Bottom‐Up
Joy Y. Cheng;Joy Y. Cheng;Caroline A. Ross;Henry I. Smith;Edwin L. Thomas.
Advanced Materials (2006)
A three-dimensional optical photonic crystal with designed point defects.
Minghao Qi;Elefterios Lidorikis;Peter T. Rakich;Steven G. Johnson.
Building Many-Core Processor-to-DRAM Networks with Monolithic CMOS Silicon Photonics
C. Batten;A. Joshi;J. Orcutt;A. Khilo.
IEEE Micro (2009)
Building Manycore Processor-to-DRAM Networks with Monolithic Silicon Photonics
C. Batten;A. Joshi;J. Orcutt;A. Khilo.
high performance interconnects (2008)
Polarization-transparent microphotonic devices in the strong confinement limit
Tymon Barwicz;Michael R. Watts;Michael R. Watts;Miloš A. Popovi cacute;Peter T. Rakich.
Nature Photonics (2007)
Fabrication of nanostructures with long-range order using block copolymer lithography
J. Y. Cheng;C. A. Ross;E. L. Thomas;Henry I. Smith.
Applied Physics Letters (2002)
The Chandra High-Energy Transmission Grating: Design, Fabrication, Ground Calibration, and 5 Years in Flight
Claude R. Canizares;John E. Davis;Daniel Dewey;Kathryn A. Flanagan.
Publications of the Astronomical Society of the Pacific (2005)
Photonic ADC: overcoming the bottleneck of electronic jitter.
Anatol Khilo;Steven J Spector;Matthew E Grein;Amir H Nejadmalayeri.
Optics Express (2012)
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