D-Index & Metrics Best Publications

D-Index & Metrics D-index (Discipline H-index) only includes papers and citation values for an examined discipline in contrast to General H-index which accounts for publications across all disciplines.

Discipline name D-index D-index (Discipline H-index) only includes papers and citation values for an examined discipline in contrast to General H-index which accounts for publications across all disciplines. Citations Publications World Ranking National Ranking
Materials Science D-index 59 Citations 10,675 290 World Ranking 3455 National Ranking 45

Overview

What is he best known for?

The fields of study he is best known for:

  • Quantum mechanics
  • Thermodynamics
  • Electrical engineering

Silicon, Optoelectronics, Etching, Nanotechnology and Surface micromachining are his primary areas of study. His Silicon research integrates issues from Particle, Composite material, Nanometre, Hillock and Isotropic etching. The various areas that he examines in his Optoelectronics study include Thin film, Joule heating, Electrical engineering and Analytical chemistry.

As part of one scientific family, he deals mainly with the area of Etching, narrowing it down to issues related to the Lithography, and often Engineering drawing. As a member of one scientific family, Michael Curt Elwenspoek mostly works in the field of Nanotechnology, focusing on Fluidics and, on occasion, Cleanroom, Volumetric flow rate, Thermal conductivity detector and Capillary electrophoresis. His biological study spans a wide range of topics, including Porosity, Fouling, Membrane technology, Microfiltration and Mechanics.

His most cited work include:

  • Comb-drive actuators for large displacements (503 citations)
  • Electrostatic curved electrode actuators (262 citations)
  • A thermopneumatic micropump based on micro-engineering techniques (256 citations)

What are the main themes of his work throughout his whole career to date?

Michael Curt Elwenspoek mainly investigates Silicon, Optoelectronics, Nanotechnology, Composite material and Surface micromachining. His Silicon study incorporates themes from Wafer, Optics, Anisotropy and Etching, Isotropic etching. His Etching research incorporates elements of Molecular physics and Monte Carlo method.

Michael Curt Elwenspoek has researched Optoelectronics in several fields, including Electronic engineering and Actuator, Electrical engineering. His Nanotechnology course of study focuses on Fluidics and Microfluidics. His work is dedicated to discovering how Composite material, Thin film are connected with Modulus and Piezoelectricity and other disciplines.

He most often published in these fields:

  • Silicon (28.01%)
  • Optoelectronics (21.99%)
  • Nanotechnology (19.90%)

What were the highlights of his more recent work (between 2006-2014)?

  • Nanotechnology (19.90%)
  • Optics (14.14%)
  • Composite material (18.85%)

In recent papers he was focusing on the following fields of study:

The scientist’s investigation covers issues in Nanotechnology, Optics, Composite material, Silicon and Cantilever. He has included themes like Fluidics, Surface micromachining, Nanometre and Nano- in his Nanotechnology study. His work deals with themes such as Pulsed laser deposition, Thin film, Surface tension and Nucleation, which intersect with Composite material.

His Silicon research integrates issues from Wafer and Silicon oxide. In his study, Hydrogen is strongly linked to Analytical chemistry, which falls under the umbrella field of Cantilever. The study incorporates disciplines such as Layer and Voltage in addition to Optoelectronics.

Between 2006 and 2014, his most popular works were:

  • Capillary filling of sub- 10 nm nanochannels (87 citations)
  • Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels (62 citations)
  • Integrated Lithographic Molding for Microneedle-Based Devices (52 citations)

In his most recent research, the most cited papers focused on:

  • Quantum mechanics
  • Thermodynamics
  • Mechanical engineering

Michael Curt Elwenspoek mainly focuses on Nanotechnology, Optics, Silicon, Surface tension and Composite material. Michael Curt Elwenspoek has researched Nanotechnology in several fields, including Fluidics and Surface micromachining. He conducts interdisciplinary study in the fields of Silicon and Diamond cubic through his works.

His biological study spans a wide range of topics, including Mechanics and Capillary action. The Composite material study combines topics in areas such as Microscopy, Impulse, Microsecond, Bubble and Forensic engineering. As a part of the same scientific study, Michael Curt Elwenspoek usually deals with the Etching, concentrating on Inverted microscope and frequently concerns with Deposition.

This overview was generated by a machine learning system which analysed the scientist’s body of work. If you have any feedback, you can contact us here.

Best Publications

Comb-drive actuators for large displacements

R. Legtenberg;A.W. Groeneveld;Michael Curt Elwenspoek.
Journal of Micromechanics and Microengineering (1996)

807 Citations

Electrostatic curved electrode actuators

R. Legtenberg;E. Berenschot;M. Elwenspoek;J. Fluitman.
international conference on micro electro mechanical systems (1995)

411 Citations

A thermopneumatic micropump based on micro-engineering techniques

F.C.M. van de Pol;H.T.G. Van Lintel;M.C. Elwenspoek;J.H.J. Fluitman.
Sensors and Actuators A-physical (1990)

390 Citations

Fabrication and interfacing of nanochannel devices for single-molecule studies

Thi Hanh Hoang;I.M. Segers-Nolten;J.W. Berenschot;M.J. de Boer.
Journal of Micromechanics and Microengineering (2009)

285 Citations

Towards integrated microliquid handling systems

Michael Curt Elwenspoek;Theodorus S.J. Lammerink;R. Miyake;J.H.J. Fluitman.
Journal of Micromechanics and Microengineering (1994)

271 Citations

Micro-liquid flow sensor

Theodorus S.J. Lammerink;Niels Roelof Tas;Michael Curt Elwenspoek;J.H.J. Fluitman.
Sensors and Actuators A-physical (1993)

266 Citations

Anisotropic Reactive Ion Etching of Silicon Using SF 6 / O 2 / CHF 3 Gas Mixtures

R. Legtenberg;Henricus V. Jansen;Meint J. de Boer;Michael Curt Elwenspoek.
Journal of The Electrochemical Society (1995)

247 Citations

The effect of surface roughness on direct wafer bonding

C. Gui;Michael Curt Elwenspoek;Niels Roelof Tas;Johannes G.E. Gardeniers.
Journal of Applied Physics (1999)

220 Citations

Development and applications of very high flux microfiltration membranes

S. Kuiper;C.J.M. van Rijn;W. Nijdam;Michael Curt Elwenspoek.
Journal of Membrane Science (1998)

205 Citations

Resistless patterning of sub-micron structures by evaporation through nanostencils

J. Brugger;J. W. Berenschot;S. Kuiper;W. Nijdam.
Microelectronic Engineering (2000)

187 Citations

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