World's Best Scientists 2026 revealed!
Michael Curt Elwenspoek

Michael Curt Elwenspoek

D-Index & Metrics

Materials Science

D-Index
67
Citations
14949
World Ranking
5154
National Ranking
65

Engineering and Technology

D-Index
67
Citations
15478
World Ranking
1320
National Ranking
28

Overview

Michael Curt Elwenspoek is affiliated with the University of Twente in the Netherlands. Their academic work spans various fields and subfields of study, although specific details on these areas, as well as publication venues and frequent coauthors, are not provided.

Elwenspoek's publication record includes recent papers; however, no specific titles, years, or venues are listed. Similarly, there is no available information on book publications or awards attributed to their career.

Their contributions to science are reflected in their association with the University of Twente, an institution recognized for research and education in technology and engineering disciplines. Details on main topics or focus areas within their research are not indicated in the provided data.

This profile summarizes verifiable factual information without extrapolation or addition of unavailable details on Michael Curt Elwenspoek's scientific work or career trajectory.

Best Publications

  • Comb-drive actuators for large displacements

    R. Legtenberg;A.W. Groeneveld;Michael Curt Elwenspoek

  • Dependence of the quality factor of micromachined silicon beam resonators on pressure and geometry

    F.R. Blom;S. Bouwstra;M. Elwenspoek;J.H.J. Fluitman

  • Electrostatic curved electrode actuators

    R. Legtenberg;E. Berenschot;M. Elwenspoek;J. Fluitman

  • A thermopneumatic micropump based on micro-engineering techniques

    F.C.M. van de Pol;H.T.G. Van Lintel;M.C. Elwenspoek;J.H.J. Fluitman

  • Capillary filling speed of water in nanochannels

    N.R. Tas;J. Haneveld;H.V. Jansen;M.C. Elwenspoek

  • Micromachining of buried micro channels in silicon

    M.J. de Boer;R.W. Tjerkstra;J.W. Berenschot;H.V. Jansen

  • Micro-liquid flow sensor

    Theodorus S.J. Lammerink;Niels Roelof Tas;Michael Curt Elwenspoek;J.H.J. Fluitman

  • Towards integrated microliquid handling systems

    Michael Curt Elwenspoek;Theodorus S.J. Lammerink;R. Miyake;J.H.J. Fluitman

  • Anisotropic Reactive Ion Etching of Silicon Using SF 6 / O 2 / CHF 3 Gas Mixtures

    R. Legtenberg;Henricus V. Jansen;Meint J. de Boer;Michael Curt Elwenspoek

  • Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as a roadmap to next generation equipment

    H V Jansen;M J de Boer;S Unnikrishnan;M C Louwerse

  • Micro mixer with fast diffusion

    R. Miyake;T.S.J. Lammerink;M. Elwenspoek;J.H.J. Fluitman

  • The effect of surface roughness on direct wafer bonding

    C. Gui;Michael Curt Elwenspoek;Niels Roelof Tas;Johannes G.E. Gardeniers

  • Development and applications of very high flux microfiltration membranes

    S. Kuiper;C.J.M. van Rijn;W. Nijdam;Michael Curt Elwenspoek

  • Resistless patterning of sub-micron structures by evaporation through nanostencils

    J. Brugger;J. W. Berenschot;S. Kuiper;W. Nijdam

  • Capillary filling of sub- 10 nm nanochannels

    J. Haneveld;Niels Roelof Tas;N. Brunets;Henricus V. Jansen

  • A closer look at the ductile-brittle transition in solid particle erosion

    H. Wensink;Michael Curt Elwenspoek

  • Deflection and maximum load of microfiltration membrane sieves made with silicon micromachining

    C. van Rijn;M. van der Wekken;W. Nijdam;M. Elwenspoek

  • A micromachined pressure/flow-sensor

    R.E. Oosterbroek;T.S.J. Lammerink;J.W. Berenschot;G.J.M. Krijnen

  • A thermo-pneumatic actuation principle for a microminiature pump and other micromechanical devices

    F.C.M. van de Pol;D.G.J. Wonnink;Michael Curt Elwenspoek;J.H.J. Fluitman

  • High resolution powder blast micromachining

    H. Wensink;J.W. Berenschot;H.V. Jansen;M.C. Elwenspoek

Frequent Co-Authors

Johannes G.E. Gardeniers
Johannes G.E. Gardeniers University of Twente
Henri Jansen
Henri Jansen Technical University of Denmark
W.J.P. van Enckevort
W.J.P. van Enckevort Radboud University
Albert van den Berg
Albert van den Berg University of Twente
Herma M. Cuppen
Herma M. Cuppen Radboud University
Guus Rijnders
Guus Rijnders University of Twente
Jürgen Brugger
Jürgen Brugger École Polytechnique Fédérale de Lausanne
Kazuo Sato
Kazuo Sato Aichi Institute of Technology
Hiroyuki Fujita
Hiroyuki Fujita Tokyo City University
Jurriaan Huskens
Jurriaan Huskens University of Twente

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