Silicon, Optoelectronics, Etching, Nanotechnology and Surface micromachining are his primary areas of study. His Silicon research integrates issues from Particle, Composite material, Nanometre, Hillock and Isotropic etching. The various areas that he examines in his Optoelectronics study include Thin film, Joule heating, Electrical engineering and Analytical chemistry.
As part of one scientific family, he deals mainly with the area of Etching, narrowing it down to issues related to the Lithography, and often Engineering drawing. As a member of one scientific family, Michael Curt Elwenspoek mostly works in the field of Nanotechnology, focusing on Fluidics and, on occasion, Cleanroom, Volumetric flow rate, Thermal conductivity detector and Capillary electrophoresis. His biological study spans a wide range of topics, including Porosity, Fouling, Membrane technology, Microfiltration and Mechanics.
Michael Curt Elwenspoek mainly investigates Silicon, Optoelectronics, Nanotechnology, Composite material and Surface micromachining. His Silicon study incorporates themes from Wafer, Optics, Anisotropy and Etching, Isotropic etching. His Etching research incorporates elements of Molecular physics and Monte Carlo method.
Michael Curt Elwenspoek has researched Optoelectronics in several fields, including Electronic engineering and Actuator, Electrical engineering. His Nanotechnology course of study focuses on Fluidics and Microfluidics. His work is dedicated to discovering how Composite material, Thin film are connected with Modulus and Piezoelectricity and other disciplines.
The scientist’s investigation covers issues in Nanotechnology, Optics, Composite material, Silicon and Cantilever. He has included themes like Fluidics, Surface micromachining, Nanometre and Nano- in his Nanotechnology study. His work deals with themes such as Pulsed laser deposition, Thin film, Surface tension and Nucleation, which intersect with Composite material.
His Silicon research integrates issues from Wafer and Silicon oxide. In his study, Hydrogen is strongly linked to Analytical chemistry, which falls under the umbrella field of Cantilever. The study incorporates disciplines such as Layer and Voltage in addition to Optoelectronics.
Michael Curt Elwenspoek mainly focuses on Nanotechnology, Optics, Silicon, Surface tension and Composite material. Michael Curt Elwenspoek has researched Nanotechnology in several fields, including Fluidics and Surface micromachining. He conducts interdisciplinary study in the fields of Silicon and Diamond cubic through his works.
His biological study spans a wide range of topics, including Mechanics and Capillary action. The Composite material study combines topics in areas such as Microscopy, Impulse, Microsecond, Bubble and Forensic engineering. As a part of the same scientific study, Michael Curt Elwenspoek usually deals with the Etching, concentrating on Inverted microscope and frequently concerns with Deposition.
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Comb-drive actuators for large displacements
R. Legtenberg;A.W. Groeneveld;Michael Curt Elwenspoek.
Journal of Micromechanics and Microengineering (1996)
Electrostatic curved electrode actuators
R. Legtenberg;E. Berenschot;M. Elwenspoek;J. Fluitman.
international conference on micro electro mechanical systems (1995)
A thermopneumatic micropump based on micro-engineering techniques
F.C.M. van de Pol;H.T.G. Van Lintel;M.C. Elwenspoek;J.H.J. Fluitman.
Sensors and Actuators A-physical (1990)
Fabrication and interfacing of nanochannel devices for single-molecule studies
Thi Hanh Hoang;I.M. Segers-Nolten;J.W. Berenschot;M.J. de Boer.
Journal of Micromechanics and Microengineering (2009)
Towards integrated microliquid handling systems
Michael Curt Elwenspoek;Theodorus S.J. Lammerink;R. Miyake;J.H.J. Fluitman.
Journal of Micromechanics and Microengineering (1994)
Micro-liquid flow sensor
Theodorus S.J. Lammerink;Niels Roelof Tas;Michael Curt Elwenspoek;J.H.J. Fluitman.
Sensors and Actuators A-physical (1993)
Anisotropic Reactive Ion Etching of Silicon Using SF 6 / O 2 / CHF 3 Gas Mixtures
R. Legtenberg;Henricus V. Jansen;Meint J. de Boer;Michael Curt Elwenspoek.
Journal of The Electrochemical Society (1995)
The effect of surface roughness on direct wafer bonding
C. Gui;Michael Curt Elwenspoek;Niels Roelof Tas;Johannes G.E. Gardeniers.
Journal of Applied Physics (1999)
Development and applications of very high flux microfiltration membranes
S. Kuiper;C.J.M. van Rijn;W. Nijdam;Michael Curt Elwenspoek.
Journal of Membrane Science (1998)
Resistless patterning of sub-micron structures by evaporation through nanostencils
J. Brugger;J. W. Berenschot;S. Kuiper;W. Nijdam.
Microelectronic Engineering (2000)
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