Ilia Katardjiev

Best Publications

• Shear mode AlN thin film electro-acoustic resonant sensor operation in viscous media

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  197
  Citations

• Thin film Lamb wave resonators in frequency control and sensing applications: a review

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  171
  Citations

• Temperature compensation of liquid FBAR sensors

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  139
  Citations

• Reactive Sputter Deposition of Highly Oriented AlN Films at Room Temperature

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  139
  Citations

• Synthesis of textured thin piezoelectric AlN films with a nonzero C-axis mean tilt for the fabrication of shear mode resonators

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  129
  Citations

• Synthesis of highly oriented piezoelectric AlN films by reactive sputter deposition

  F. Engelmark;G. Fucntes;I. V. Katardjiev;A. Harsta

  128
  Citations

• Lateral-field-excited thin-film Lamb wave resonator

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  116
  Citations

• Micromachined thin film plate acoustic resonators utilizing the lowest order symmetric lamb wave mode

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  114
  Citations

• Frequency response in pulsed DC reactive sputtering processes

  Lars Jonsson;Tomas Nyberg;Ilia Katardjiev;Sören Berg

  103
  Citations

• Structural and electroacoustic studies of AlN thin films during low temperature radio frequency sputter deposition

  Fredrik Engelmark;Gonzalo Fuentes Iriarte;Ilia Katardjiev;M Ottosson

  99
  Citations

• Preferential sputtering effects in thin film processing

  Sören Berg;Ilia Katardjiev

  98
  Citations

• Synthesis of c-axis-oriented AlN thin films on high-conducting layers: Al, Mo, Ti, TiN, and Ni

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  95
  Citations

• Immunosensor utilizing a shear mode thin film bulk acoustic sensor

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  90
  Citations

• Dependence of the electromechanical coupling on the degree of orientation of c-textured thin AlN films

  J. Bjurstrom;D. Rosen;I. Katardjiev;V.M. Yanchev

  90
  Citations

• Surface acoustic wave induced particle manipulation in a PDMS channel--principle concepts for continuous flow applications.

  Linda Johansson;Linda Johansson;Johannes Enlund;Stefan Johansson;Ilia Katardjiev

  89
  Citations

• Recent developments in thin film electro-acoustic technology for biosensor applications

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  83
  Citations

• Electrical characterization of AlN MIS and MIM structures

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  82
  Citations

• A micromachined thermally compensated thin film Lamb wave resonator for frequency control and sensing applications

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  76
  Citations

• Etch rates of crystallographic planes in Z-cut quartz - experiments and simulation

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  76
  Citations

• Mass sensitivity of multilayer thin film resonant BAW sensors

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  67
  Citations